Precision Stage - Company Ranking(7 companyies in total)
Last Updated： Aggregation Period:Jul 16, 2025〜Aug 12, 2025
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Display Company Information
| Company Name | Featured Products | ||
|---|---|---|---|
| Product Image, Product Name, Price Range | overview | Application/Performance example | |
Ultra-precision stage
Other |
◆Achieve high straightness, positioning/repeatability accuracy with non-contact & ultra-precision machining! By using a non-contact air slide, there is no dust generation, allowing for maintenance-free operation. Additionally, by using guides made of ultra-high precision fine ceramics and assembling and adjusting them in a precision constant temperature environment, we achieve positioning/repeatability accuracy on the order of nanometers and extremely high motion accuracy (*). (* The positioning accuracy/repeatability accuracy depends on the configuration of the stage and the operating environment. We will provide suggestions to achieve your desired accuracy, so please feel free to consult with us.) | ◆Applications Semiconductor manufacturing equipment such as exposure devices Semiconductor inspection equipment Optical modules and semiconductor assembly equipment Precision measuring instruments ◆Production Achievements-1 (See attached image) Stage type: Ceramic XYZ 3-axis stacked Drive method: Coarse movement: Ball screw Fine movement: PZT (Piezo) Encoder: Optical linear encoder Stroke: X, Y: 10mm Z: 5mm Repeatability: X, Y, Z: ±0.01µm or less ◆Production Achievements-2 (See attached image) Stage type: Ceramic XYZθ air slide stage Encoder: X, Y: Laser interferometer Z, θ: Optical linear encoder Stroke: X, Y: 300mm Z: 7mm Positioning accuracy: X, Y: ±1.0µm/300mm Repeatability: X, Y: ±0.1µm Straightness: X, Y: ±0.2µm or less/300mm Orthogonality: X, Y: ±0.5µm or less/300mm | |
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ピーエムティー 本社・工場
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- Featured Products
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Ultra-precision stage
- overview
- ◆Achieve high straightness, positioning/repeatability accuracy with non-contact & ultra-precision machining! By using a non-contact air slide, there is no dust generation, allowing for maintenance-free operation. Additionally, by using guides made of ultra-high precision fine ceramics and assembling and adjusting them in a precision constant temperature environment, we achieve positioning/repeatability accuracy on the order of nanometers and extremely high motion accuracy (*). (* The positioning accuracy/repeatability accuracy depends on the configuration of the stage and the operating environment. We will provide suggestions to achieve your desired accuracy, so please feel free to consult with us.)
- Application/Performance example
- ◆Applications Semiconductor manufacturing equipment such as exposure devices Semiconductor inspection equipment Optical modules and semiconductor assembly equipment Precision measuring instruments ◆Production Achievements-1 (See attached image) Stage type: Ceramic XYZ 3-axis stacked Drive method: Coarse movement: Ball screw Fine movement: PZT (Piezo) Encoder: Optical linear encoder Stroke: X, Y: 10mm Z: 5mm Repeatability: X, Y, Z: ±0.01µm or less ◆Production Achievements-2 (See attached image) Stage type: Ceramic XYZθ air slide stage Encoder: X, Y: Laser interferometer Z, θ: Optical linear encoder Stroke: X, Y: 300mm Z: 7mm Positioning accuracy: X, Y: ±1.0µm/300mm Repeatability: X, Y: ±0.1µm Straightness: X, Y: ±0.2µm or less/300mm Orthogonality: X, Y: ±0.5µm or less/300mm
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ピーエムティー 本社・工場
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