Analysis Seminar "Electrical Property Evaluation of Semiconductor Materials - Evaluation of Insulating Films Using Mercury Probes, Defect Evaluation of Semiconductors and Insulating Film/Semiconductor Interfaces Using DLTS -"

To create high-performance semiconductor devices, it is necessary to understand and control the electrical properties and physical characteristics of each material used in device formation. This is because, even as the miniaturization and complexity of semiconductor devices progress to their limits, the need to maximize the inherent properties of the materials remains unchanged. This course is structured in two parts: the first half introduces the mercury probe, which is useful for evaluating the fundamental electrical characteristics of insulating films and semiconductors used in semiconductor devices, such as capacitance-voltage (C-V) characteristics and current-voltage (I-V) characteristics, and demonstrates the relationship between film quality and the electrical properties of semiconductor materials in combination with various physical analyses. The second half presents Deep Level Transient Spectroscopy (DLTS), a method for electrically detecting defects that affect the characteristics of semiconductor devices, highlighting its usefulness based on case studies evaluating defects at the semiconductor and insulating film/semiconductor interface.

Date and time | Wednesday, Dec 03, 2025 01:00 PM ~ 04:00 PM |
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Entry fee | Charge 44,000 yen |
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