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  1. Home
  2. Testing, Analysis and Measurement
  3. クボタ計装
  4. [Exhibition Information] We will be exhibiting at 'SEMICON JAPAN 2025'.
OTHER
  • Oct 08, 2025
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Oct 08, 2025

[Exhibition Information] We will be exhibiting at 'SEMICON JAPAN 2025'.

クボタ計装 クボタ計装
We will be exhibiting Kubota's semiconductor inspection equipment at SEMICON JAPAN, an international exhibition of manufacturing technologies, equipment, and materials in the semiconductor industry. All of our staff sincerely look forward to your visit. 【Exhibition Information】 Date: December 17 (Wed) - 19 (Fri), 2025, 10:00 - 17:00 Venue: Tokyo Big Sight Booth Location: W1963 *Advance registration is required for attendance. Please check the SEMICON JAPAN website for registration details.
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K-IM-G100 画像式ウェハ表面欠陥検査装置.png

Microscopic wafer surface defect inspection device

High-precision inspection equipment compatible with transparent materials.

This is a surface defect inspection device equipped with a differential interference microscope, applicable to transparent materials. It is capable of outputting defect maps through comprehensive inspections and allows for microscopic observation of detected defects. ■ Features of the device - Defect extraction and discrimination functions using proprietary image processing technology - High-precision marking while observing defects - Enables observation and creation of defect albums based on defect coordinates for wafers inspected by other devices - Development of a crystal defect detection function is underway

  • Semiconductor inspection/test equipment

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K-VI-G100 ウェハ外観検査装置.png

Wafer appearance inspection equipment (automatic visual inspection equipment)

Automating visual inspection of wafer defects.

■This is a device that responds to the following requests and concerns! - We want to automate visual inspection of defects on wafers (substrates). - We want to reduce and prevent variability in pass/fail judgments among inspectors. - We want to save inspection data and trace quality. - We want to automatically discriminate defects. ■Features of the device - It can automatically detect, extract, and discriminate visually identifiable defects. - We can propose an optical system optimized for the types of defects. - We can suggest both manual and automatic transport (cassette to cassette). - It also implements AI functions, allowing for improved defect discrimination accuracy through ongoing learning.

  • Semiconductor inspection/test equipment

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K-LE-G200 レビュー機能付きウェハ表面欠陥検査装置.png

Wafer surface defect inspection device with review function

Equipped with a review microscope! Defects detected can be observed in real-time with the microscope.

By irradiating a high-power laser onto a wafer on a rotating stage, the entire surface is inspected at high speed, allowing for the detection of minute defects. By combining multiple channels such as scattering, reflection, and phase shift, defect detection suitable for various applications can be achieved, enabling discrimination by defect type such as unevenness. ■ Features of the device - High-speed inspection (approximately 181 seconds/12 inches) - Equipped with a review microscope - The microscope can be selected as either a laser microscope or a differential interference microscope - High-precision scribing using the microscope for analysis with SEM, etc. - Optional edge inspection functionality is available

  • Semiconductor inspection/test equipment

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K-LE-G100 レーザー式ウェハ表面欠陥検査装置.png

Laser-type wafer surface defect inspection device - Laser Explorer

Transparent wafers also undergo high-speed inspection! High-output lasers detect tiny scratches and particles!

The "Laser Explorer" is the latest wafer surface defect inspection device that also supports transparent wafers. A high-power laser detects minute defects such as scratches, pits, and particles! It can be utilized for shipping and receiving inspections of wafers, as well as for quality control in the epitaxial process! 【Other Features】 ■ High throughput (inspects 25 wafers in a cassette in about 40 minutes) ■ Discriminates the unevenness of defects ■ Automatic focusing for all samples ■ Customizable options ■ Supports automatic inspection of one cassette ■ High-precision marking for defects (optional) ■ Defect review using a laser microscope (optional)

  • Visual Inspection Equipment
  • Defect Inspection Equipment
  • Circuit Board Inspection Equipment

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Related catalog(4)

Wafer Appearance Inspection Equipment Catalog _ K-VI -G100

Wafer Appearance Inspection Equipment Catalog _ K-VI -G100

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Wafer Surface Defect Inspection Device (Laser Type) _K-LE-G100

Wafer Surface Defect Inspection Device (Laser Type) _K-LE-G100

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Wafer surface defect inspection device with review function (laser type) _K-LE-G200

Wafer surface defect inspection device with review function (laser type) _K-LE-G200

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Wafer Surface Defect Inspection Device (Image-based) _K-IM-G100

Wafer Surface Defect Inspection Device (Image-based) _K-IM-G100

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AAEON Mini-ITX Standard Industrial Motherboard with Intel Core Ultra5 125H, DC12V Input [MIX-MTLD1]

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Features ● Equipped with Intel Core Ultra 5 125H ● Dual Channel DDR5 5600MHz × 2 slots (up to 96GB) (sold separately) ● HDMI 2.0 × 4 ● M.2 3042/3052 B-Key × 1, 2230 E-Key × 1, 2280 M-Key × 1 (PCIe Gen4 [x4], NVMe) (sold separately) ● USB 2.0 × 5, USB 3.2 × 3, USB 3.2 Gen 1 (Type-C) × 1 ● LAN × 2 ● 12V DC input power ● OOB (Out-of-Band Management) module compatible: MOD-RMB (via i210-AT) * This model does not include memory, storage, or OS.

Oct 16, 2025

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AAEON Mini-ITX Standard Industrial Motherboard Compatible with Intel Core Ultra 200S Series [MIX-H810WV1]

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Features ● Compatible with Intel Core Ultra 200S series ● DDR5 SODIMM x 2 (up to 96GB) ● PCIe x4 x 1, M.2 3042/52 B-key x 1 ● USB2.0 x 4, USB3.2 Gen2 x 2 (rear I/O), USB3.2 Gen1 x 1, USB2.0 x 1 (pin header) ● SATA 6Gb/s x 2 ● HDMI 2.0 x 2, DP 1.4 x 1 ● DC input 19V ~ 24V * This model does not include memory, storage, or OS.

Oct 16, 2025

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AAEON Mini-ITX Standard Industrial Motherboard with Intel N97【MIX-ASLD1】

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Features ● Equipped with Intel Processor N97 ● DDR5 SODIMM up to 16GB (sold separately) ● M.2 2280 M-Key x 1 (Auto Detect, PCIe [x1] & SATA Mode), M.2 2230 E-Key x 1, M.2 3042/52 B-Key x 1 ● USB3.2 x 1 (rear I/O), USB2.0 x 4 (pin header) ● PoE x 1, GbE LAN x 1 ● 12V DC input ● OOB onboard * This model does not include memory, storage, or OS.

Oct 16, 2025

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【Metal Crack Repair】We repair cracks in metal products without applying heat.

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  • CATALOG

The "Mechanical Stitch Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Oct 16, 2025

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Aluminum casting repair: Metal crack repair without applying heat.

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  • PRODUCT

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Oct 16, 2025

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