Transparent wafers also undergo high-speed inspection! High-output lasers detect tiny scratches and particles!
The "Laser Explorer" is the latest wafer surface defect inspection device that also supports transparent wafers. A high-power laser detects minute defects such as scratches, pits, and particles! It can be utilized for shipping and receiving inspections of wafers, as well as for quality control in the epitaxial process! 【Other Features】 ■ High throughput (inspects 25 wafers in a cassette in about 40 minutes) ■ Discriminates the unevenness of defects ■ Automatic focusing for all samples ■ Customizable options ■ Supports automatic inspection of one cassette ■ High-precision marking for defects (optional) ■ Defect review using a laser microscope (optional)
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【Main Specifications】 (Model: LE-W1) Detection Method: Laser scattering method, reflection method, phase shift method Detected Defects: Particles, scratches, pits, hillocks, stains, etc. Target Materials: Si, SiC, GaN, LT, sapphire, etc. Target Sizes: 2, 4, 6, 8 inches (other sizes available upon consultation) Inspection Time: Approximately 90 seconds per sheet (4 inches, 10μm pitch, including transport time) Laser Wavelength: 405nm Inspection Pitch: 5 to 30μm Result Output: Map, categorized graphs, list, size classification Equipment Dimensions: W 1800 × D 990 × H 1490 (mm) *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
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For more details, please refer to the catalog or feel free to contact us.
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Kubota has supported a rich society and the circulation of nature by addressing issues related to food, water, and the environment, which are essential for human survival. The Kubota Precision Equipment Business Unit and Kubota Instrumentation provide solutions based on "measurement and metrology technology" that meet the demands of various industries for automation, labor saving, high-precision measurement and control, and data processing, contributing to the development of society.
