Trelleborg Isolast PureFab FFKM
Isolast® PureFab® is a sealing material that exhibits exceptional plasma resistance in extremely high purity and high-temperature environments, crucial for semiconductor manufacturing processes. The Isolast® PureFab series demonstrates excellent performance in demanding pre-processes such as film deposition, etching, ashing/stripping, plasma cleaning, and ALD. The Isolast® PureFab series utilizes advanced perfluoroelastomer (FFKM), offering outstanding properties such as high-temperature stability, high purity, extremely low metal leaching, and exceptional plasma resistance. This helps minimize particle generation and significantly reduces outgassing in high vacuum environments, allowing customers to extend maintenance cycles and greatly improve process yields.
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