The 13th International Symposium on Sputtering & Plasma Processes
At the panel exhibition corner held in conjunction with the 13th International Symposium on Sputtering & Plasma Processes, we will introduce ALD equipment and GCIB equipment.

| Date and time | Wednesday, Jul 08, 2015 ~ Friday, Jul 10, 2015 |
|---|---|
| Capital | Kyoto Research Park |
| Entry fee | Charge |
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