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  3. NITTA DuPont Incorporated
  4. 【Technical Information】Grooving Process for CMP Polishing Pads
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  • Jan 16, 2019
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Jan 16, 2019

【Technical Information】Grooving Process for CMP Polishing Pads

NITTA DuPont Incorporated NITTA DuPont Incorporated
In selecting CMP pads, I will explain about one of the components, the groove processing. Generally, the surface of CMP pads is often grooved by the manufacturer before shipment. By applying groove processing to the surface of CMP pads, the following effects can be expected: 1. Improved retention and flowability of polishing slurry 2. Enhanced uniformity within the wafer surface and increased polishing rate 3. Prevention of wafer adhesion to the polishing pad surface 4. Discharge of processing debris and reaction byproducts The main specifications for groove processing typically include XY linear grooves, perforation grooves (through holes), and concentric grooves, and in some products, combinations of these may be possible. Various specifications for XY linear grooves, such as groove width and pitch, are available. We will select the optimal groove specifications tailored to your conditions, such as polishing equipment and processes, so please feel free to consult with us.
Examples of groove machining patterns
Examples of groove machining patterns
Comparison table of CMP pad product line and groove specifications.
Comparison table of CMP pad product line and groove specifications.
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IC1000(TM)画像.jpg

Foam Polyurethane Pad "IC1000(TM)"

The de facto standard for polishing pads in the CMP process. World market share No. 1!

There have been numerous successful adoptions to date, and we continue to maintain a high market share. The IC1000(TM) is designed based on special materials, manufacturing, and processing technologies, as well as advanced application evaluation techniques, ensuring optimal performance.

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EXTERION(TM)画像.jpg

Foam Polyurethane Pad "EXTERION(TM)"

Polishing pads optimal for primary polishing in mirror surface finishing.

The EXTERION(TM) series is a polyurethane foam pad created from advanced foam control technology. It is used for primary polishing of silicon wafers and compound substrates, providing a high-quality finish and reliable polishing performance. Additionally, its special processing technology demonstrates excellent thickness precision and startup performance.

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不織布パッド『SUBA』.JPG

Non-woven fabric pad "Suba(TM)"

A non-woven fabric-based polishing pad that responds well to various applications.

"Suba(TM)" is a polishing pad made from polyester fibers, with polyurethane impregnated into a non-woven fabric formed by a dry process. It demonstrates excellent performance primarily for primary and secondary polishing of silicon wafers, sapphire wafers, and oxide wafers. It can also be used for edge polishing and notch polishing, and offers a wide range of products tailored to each process. 【Features】 ■ High polishing rate ■ Low defect rate ■ High flatness *For more details, please refer to the catalog or feel free to contact us.

  • Wafer processing/polishing equipment
  • Hand polishing and filing
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H1000画像.png

Soft Pad "H1000"

Polishing pad for achieving defect-free finishes

The H1000 series pad was developed as a pad for final polishing of silicon wafers. Its unique resin design demonstrates excellent scratch performance, and the straight pore structure achieves high stability and long life.

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Related catalog(1)

Nitta Dupont Co., Ltd. "CMP Polishing Pad" Product Catalog

Nitta Dupont Co., Ltd. "CMP Polishing Pad" Product Catalog

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Please take a look at Fukuda's gas leak test (hydrogen leak and helium leak)!

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● What is a hydrogen leak detector? It can measure leaks in small areas that could not be detected in air leak tests and can also identify the leak locations. It is a detector that uses a mixture of 5% hydrogen and 95% nitrogen (non-flammable gas: ISO10156:2017) as the tracer gas. ● What is a helium leak test system? It is a leak test system suitable for high-precision or high-pressure leak inspections. The helium leak test system uses helium gas as the detection gas (tracer gas) and detects the helium that has leaked out. It is the leak test method among Fukuda's leak testers that can detect the smallest leaks.

Apr 17, 2026

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

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Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Apr 17, 2026

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[Video Manual Guide] We will clearly explain how to connect the wireless set that links the bed exit sensor and nurse call system through video!

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Hotron, which manufactures and sells sensors, provides bed exit sensors for hospitals, nursing, and care facilities. Hotron offers easy-to-understand video guidance on how to use the bed exit sensors wirelessly and how to set up device connections! ▼ Video Manual (YouTube) https://www.youtube.com/playlist?list=PLNVA4mTrZDqtJa6MfFRZQxwtfCSnAfxVy 【Bed Exit Sensors】 ○ Non-contact infrared sensor, simply place it - Pole-kun HB-H1 ○ Mat sensor, foldable thin mat - Mat-kun HB-UST ○ Body movement call - Ugo-kun HB-TV3 ○ Body movement call for wheelchairs - Ayumi-chan HB-WTV3 【Options】 ○ Nurse call linked wireless set - Wireless set (transmitter/receiver) HB-RS/HB-RJ ◎ For more information about the products, please contact us or download the catalog.

Apr 16, 2026

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HK-2

Recommended for earthquake measures for automatic doors and equipment! Seismic device HK-2.

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Japan is among the top 10 countries in the world with frequent earthquakes. The 2020 White Paper on Land, Infrastructure, Transport and Tourism has also reported an increase in the probability of significant earthquakes occurring. For the Nankai Trough earthquake, the probability of an earthquake with a magnitude of 8 to 9 occurring within the next 30 years is estimated to be 70 to 80%. At Hotron, we recommend the introduction of seismic devices for earthquake measures in buildings and equipment. The seismic device 'HK-2' is a product that automatically performs various controls that have been pre-set when it detects strong shaking equivalent to a seismic intensity of 5 lower or higher. For example, it can automatically execute actions such as: "Open automatic doors and gates to secure evacuation routes and access for emergency vehicles" "Transmit signals to the control room and stop facility equipment" "Unlock the keys to locked lockers" "Automatically play voice guidance" ◎ For more details, please download the materials or contact us.

Apr 16, 2026

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■■ Leak test for pouch containers such as packed rice! | MSQ-2003 series ■■ Packaging container air leak test device, pinhole inspection device, and full inspection device.

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The pinhole inspection for packaging engineering is fully automated, eliminating packaging defects based on certain quality standards. The judgment results and operational status can be managed via a monitor screen. - Quantitative management of quality standards for the pinhole inspection process - Ensuring the quality of the product's shelf life - Establishing evaluation criteria for the manufacturing process, achieving quantitative quality assurance - Slim and space-saving design that can be connected to existing production lines - Quick changeover for product variety switching can be handled in a short time by exchanging chambers - Fully domestically produced, allowing for rapid maintenance and troubleshooting - Example target works: pillow packaging, packaged rice (packaged cooked rice), etc. *Please consult us regarding the use of this product for pharmaceuticals.

Apr 16, 2026

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