Released the VDM300 Deionized Water Vapor Delivery Module.

The VDM300, designed for advanced stripping and passivation processes after metal etching, achieves superior accuracy, high flow rates, a wide control range, and low power consumption compared to flash vaporization systems.
Features of the VDM300:
1. Flow range: 3 slpm (DIW vapor)
2. Direct steam measurement for excellent flow accuracy
3. Direct connection to the plant's pure water supply system
4. Operable even at minimum temperature (non-heated state)
5. Optimally designed for rinsing and drainage
6. EtherCAT digital communication
7. Brooks Expert Support Tool (BEST) graphical interface

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