Modular Structure Vacuum Device - Multi-Purpose Vacuum Deposition Device HEX Series - High Expandability & High Maintainability

A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.

The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.

• Sputtering Equipment

Multi-purpose vacuum deposition device HEX system RF & DC sputtering source

This is a sputtering source for the multi-purpose vacuum deposition device HEX/HEX-L. It can be used in DC mode when the target is a conductor and in RF mode when the target is an insulator. With a gas hood as standard equipment, it is possible to increase the pressure near the target surface while keeping the chamber pressure low during film formation. Quick-release connectors are used for the connections of cooling water piping and gas piping, allowing for easy installation and removal of the piping without the need for tools. The Fission source can be fixed to the chamber with four butterfly nuts, eliminating the need for tools during installation and removal. It also supports reactive sputtering, enabling the deposition of oxides and nitrides. Up to three deposition sources can be installed on the HEX and up to six on the HEX-L, allowing for the deposition of multilayer films and compound films.

• Sputtering Equipment

Resistance heating evaporation source for the multi-purpose vacuum deposition device HEX system.

This is a resistance heating evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The resistance heating evaporation method is the most common vacuum deposition process. Materials are placed in a boat-type or crucible-type heating container, and by passing current through the heating container, resistance heat is generated to heat the materials. Once the temperature of the heating container rises sufficiently, the materials inside begin to evaporate. The deposition rate can be controlled by the current. The advantage of the resistance heating evaporation device is that it does not use process gases. Therefore, it operates at high vacuum levels, resulting in deposited films containing very few impurities. The TES source is fixed to the chamber with four butterfly nuts. Additionally, the cooling water piping is connected via quick-release connectors, allowing for quick replenishment of materials or replacement of boats/filaments. Up to five TES sources can be installed on the HEX, and up to six on the HEX-L. They can also be used in combination with the sputter source Fission, the electron beam evaporation source TAU, and the organic evaporation source ORCA.

• Sputtering Equipment

Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.

This is an electron beam evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The TAU series is a "mini" electron beam evaporation source. By using TAU, the HEX system can be utilized as an electron beam evaporation device (EB evaporation device). The material is heated by applying high voltage to it and accelerating thermal electrons emitted from a filament located right next to it to collide with the material. Unlike large electron beam evaporation sources, it does not use electron beam deflection magnets. Each pocket of the TAU source is equipped with a "flux monitoring plate" as standard, which detects the slight ions contained in the vapor. The ion current value detected here is proportional to the deposition rate and is sensitive enough to precisely grow sub-monolayer films. The TAU-4, which is a simultaneous deposition model with four sources, has independent flux monitoring plates in each of the four pockets, allowing for monitoring of the deposition rate in each pocket during simultaneous deposition. The TAU source can deposit from either a rod or a crucible, depending on the material. We can suggest the optimal deposition method, so please feel free to contact us.

• Sputtering Equipment

Organic deposition source for the multipurpose vacuum deposition device HEX system.

This is an organic deposition source for the multi-purpose vacuum deposition device HEX/HEX-L. By installing ORCA, the HEX system can be used as an organic material deposition device. The ORCA source actively cools the crucible. The balance between heating and cooling achieves excellent temperature stability and control. The crucible is made of a material with high thermal conductivity, preventing the occurrence of hotspots that could adversely affect the deposition rate. Alumina and graphite liners are also available. The temperature of the crucible is measured by a K-type thermocouple, allowing for more accurate temperature measurements than conventional contact thermocouples. ORCA comes with a power supply unit and a PID controller optimized for low-temperature operation. The ORCA source can be used in combination with sputter sources, electron beam deposition sources, and resistance heating deposition sources. The area around the crucible is covered with a cooled protective cap, minimizing thermal interference from adjacent sources.

• Sputtering Equipment

Multipurpose Vacuum Deposition Device HEX System Sample Stage | Fixed, Rotating, Rotating Heating, Rotating Water Cooling

This is a sample stage for the multi-purpose vacuum deposition device HEX/HEX-L. Choosing the correct sample stage is as important as selecting the right film formation method. The characteristics of the sample stage affect uniformity, morphology, and film composition. It accommodates samples with a maximum diameter of 4 inches for HEX and 6 inches for HEX-L. In addition to the standard fixed sample stage, rotating, rotating heated, and rotating water-cooled sample stages are available.

• Sputtering Equipment

[To the owners of parking lots and parking lot construction companies] "I'm worried about the possibility of colliding with pedestrians when exiting the parking lot..." Among vehicle entrances to parking lots, stores, residences, and factories, those facing sidewalks or roadways are particularly prone to dangerous incidents such as collisions with pedestrians or between vehicles. To alleviate such concerns, Hotron proposes a [Vehicle Exit Warning Sensor] that detects vehicle departures at various sites and alerts the surroundings with LED lights and buzzers. The system consists of a simple configuration of "Sensor" + "Controller" + "Switching Power Supply (24V)" + "LED Rotating Light." *When using the exit warning system, we kindly ask customers to arrange for the switching power supply (24V), LED rotating light, control panel, circuit breaker, etc. Since it can be retrofitted, it can also be used for existing parking lot entrances. [Contents Included] ○ Vehicle Exit Warning System Configuration ○ Comparison Table of Exit Warning Sensors ○ Four Modes ○ Wide Range of Applications ○ Customer Feedback ○ Appearance Diagram / Specifications ◎ For more details, please contact us or download the catalog.

Automate pressure control and use it as a pressure/back pressure regulator! The Auto Pressure Controller "SLA/SLAMf Series" is equipped with a wealth of options and features. By combining the SLA/SLAMf Series with mass flow controllers and meters, you can achieve consistency in control (process) with the advantages of a single platform. The SLA/SLAMf Series uses a primary flow calibration system that is traceable to international standards, characterized by high precision, long-term stability of the zero point, and excellent reproducibility based on our superior measurement systems and methods. Applications: ■ Thin film processes ■ Catalyst research and pilot processes in chemical and petrochemical industries ■ Laboratory and analytical systems ■ Fuel cell technology ■ Life sciences bioreactors

In recent times, there has been a growing interest in infection control measures and facility hygiene management. Our company offers non-contact sensor products that are recommended for commercial facilities, food factories, and nursing and caregiving facilities. 【Sensors for Automatic Doors】 ● Light Touch Sensor HA-T401 … When you wave your hand in front of the automatic door, the sensor detects the movement and opens or closes the door. It is recommended for making doors that use touch switches non-contact. ● Hand Wave Sensor PF-R5, PF-U2, DHS-1 … Opens and closes the automatic door by waving your hand in front of the sensor. ● Foot Switch PF-01S/01D/03S/05 … Opens and closes the automatic door by placing your foot in the opening. 【Access Control System】 ● Face Recognition + Unmanned Temperature Measurement DS Series … Capable of detecting mask-wearing and measuring body temperature simultaneously with face recognition. ● Automatic Disinfectant Spray Dispenser PHW-03B … Automatically sprays disinfectant when you wave your hand in front of the sensor. 【Nursing and Care Sensors】 ● Infrared Bed Exit Sensor "Just Place It Pole-kun" … This bed exit sensor is installed next to the bed and alerts via nurse call when the subject enters the detection range. ◎ For more details, please download the catalog or contact us.

A world where miniaturization and high performance are advancing daily. Mobile phones now have features that were unimaginable just a few years ago. The realization of such high performance is thanks to thin film technology, which is utilized in a wide range of applications as follows: 【Applications of Thin Film Technology】 - Microelectronics - Anti-reflective coatings for glass - Antibacterial metal coatings for medical devices - Flexible solar cells Thin film technology is defined as "the process of creating, coating, and processing thin film materials on a substrate surface." We are currently publishing basic knowledge materials on glass coatings for the glass industry! ⚫ Glass Coatings ⚫ What is Low-E Glass? ⚫ Laminating and Materials of Low-E Coatings ⚫ Application Requirements ⚫ What is Low-E Coating Technology? ⚫ Glass Coating Market Please take a moment to read it. https://mono.ipros.com/news/detail/129167/

● This is a leak testing device for small electronic components that does not use fluorinated inert liquids (PFAS-free). ● There is no longer a need for unstable visual confirmation through liquid immersion testing. It adopts a quantitative testing method that allows for stable pressure leak testing. ● It is a tabletop leak testing device specifically for gross leaks, with accuracy equal to or greater than that of liquid immersion testing. ● The detectable range is approximately 1×10⁻² Pa·m³/s to 1×10⁻⁶ Pa·m³/s (varies depending on the target product). ● It is suitable for sealed structures ranging from a few millimeters to a maximum of 80 × 70 mm. Please feel free to contact us for more information!