Modular Structure Vacuum Device - Multi-Purpose Vacuum Deposition Device HEX Series - High Expandability & High Maintainability

A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.

The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.

• Sputtering Equipment

Multi-purpose vacuum deposition device HEX system RF & DC sputtering source

This is a sputtering source for the multi-purpose vacuum deposition device HEX/HEX-L. It can be used in DC mode when the target is a conductor and in RF mode when the target is an insulator. With a gas hood as standard equipment, it is possible to increase the pressure near the target surface while keeping the chamber pressure low during film formation. Quick-release connectors are used for the connections of cooling water piping and gas piping, allowing for easy installation and removal of the piping without the need for tools. The Fission source can be fixed to the chamber with four butterfly nuts, eliminating the need for tools during installation and removal. It also supports reactive sputtering, enabling the deposition of oxides and nitrides. Up to three deposition sources can be installed on the HEX and up to six on the HEX-L, allowing for the deposition of multilayer films and compound films.

• Sputtering Equipment

Resistance heating evaporation source for the multi-purpose vacuum deposition device HEX system.

This is a resistance heating evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The resistance heating evaporation method is the most common vacuum deposition process. Materials are placed in a boat-type or crucible-type heating container, and by passing current through the heating container, resistance heat is generated to heat the materials. Once the temperature of the heating container rises sufficiently, the materials inside begin to evaporate. The deposition rate can be controlled by the current. The advantage of the resistance heating evaporation device is that it does not use process gases. Therefore, it operates at high vacuum levels, resulting in deposited films containing very few impurities. The TES source is fixed to the chamber with four butterfly nuts. Additionally, the cooling water piping is connected via quick-release connectors, allowing for quick replenishment of materials or replacement of boats/filaments. Up to five TES sources can be installed on the HEX, and up to six on the HEX-L. They can also be used in combination with the sputter source Fission, the electron beam evaporation source TAU, and the organic evaporation source ORCA.

• Sputtering Equipment

Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.

This is an electron beam evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The TAU series is a "mini" electron beam evaporation source. By using TAU, the HEX system can be utilized as an electron beam evaporation device (EB evaporation device). The material is heated by applying high voltage to it and accelerating thermal electrons emitted from a filament located right next to it to collide with the material. Unlike large electron beam evaporation sources, it does not use electron beam deflection magnets. Each pocket of the TAU source is equipped with a "flux monitoring plate" as standard, which detects the slight ions contained in the vapor. The ion current value detected here is proportional to the deposition rate and is sensitive enough to precisely grow sub-monolayer films. The TAU-4, which is a simultaneous deposition model with four sources, has independent flux monitoring plates in each of the four pockets, allowing for monitoring of the deposition rate in each pocket during simultaneous deposition. The TAU source can deposit from either a rod or a crucible, depending on the material. We can suggest the optimal deposition method, so please feel free to contact us.

• Sputtering Equipment

Organic deposition source for the multipurpose vacuum deposition device HEX system.

This is an organic deposition source for the multi-purpose vacuum deposition device HEX/HEX-L. By installing ORCA, the HEX system can be used as an organic material deposition device. The ORCA source actively cools the crucible. The balance between heating and cooling achieves excellent temperature stability and control. The crucible is made of a material with high thermal conductivity, preventing the occurrence of hotspots that could adversely affect the deposition rate. Alumina and graphite liners are also available. The temperature of the crucible is measured by a K-type thermocouple, allowing for more accurate temperature measurements than conventional contact thermocouples. ORCA comes with a power supply unit and a PID controller optimized for low-temperature operation. The ORCA source can be used in combination with sputter sources, electron beam deposition sources, and resistance heating deposition sources. The area around the crucible is covered with a cooled protective cap, minimizing thermal interference from adjacent sources.

• Sputtering Equipment

Multipurpose Vacuum Deposition Device HEX System Sample Stage | Fixed, Rotating, Rotating Heating, Rotating Water Cooling

This is a sample stage for the multi-purpose vacuum deposition device HEX/HEX-L. Choosing the correct sample stage is as important as selecting the right film formation method. The characteristics of the sample stage affect uniformity, morphology, and film composition. It accommodates samples with a maximum diameter of 4 inches for HEX and 6 inches for HEX-L. In addition to the standard fixed sample stage, rotating, rotating heated, and rotating water-cooled sample stages are available.

• Sputtering Equipment

Technoa Co., Ltd. (Headquarters: Gifu City, Gifu Prefecture, Representative Director: Koji Yamazaki) will hold a limited-time summer special event, "Monozukuri DX CAMP," from Saturday, August 9, 2025, to Saturday, August 23, 2025. Small and medium-sized manufacturing companies face challenges such as a shortage of specialized personnel and a lack of know-how and information, which act as barriers to promoting DX (digital transformation). This event will provide a step-by-step approach to "realistic DX," based on the know-how accumulated by Technoa while supporting the DX transformation of small and medium-sized manufacturing companies. It will be structured as DAY.1 to DAY.5, offering an opportunity for skill development during the summer break and supporting the learning and growth of small and medium-sized manufacturers. For more details, please refer to the related link.

JOHNAN has updated a webpage summarizing the selection points to solve various challenges in large-scale processing (quality maintenance, short delivery times, costs). This article introduces the challenges faced in large-scale processing based on years of knowledge and experience, as well as the key points for choosing the optimal contractor that balances quality and short delivery times. If you are looking for a reliable contractor, please make use of our "Large-Scale Processing Solutions." ▼For more details "Large-Scale Processing Solutions to Achieve Product Quality and Short Delivery Times" https://www.johnan.com/solution/process/processing-assembly/post_8.html

Thank you very much for your continued support. We sincerely apologize for the inconvenience, but our company will be closed for summer vacation during the following period. 【Closure Period】 From Saturday, August 9, 2025, to Thursday, August 14, 2025. We will resume normal business operations on Friday, August 15. We appreciate your understanding during this time and apologize for any inconvenience caused.

JOHNAN has released a video that clearly explains the implementation technology for stretchable films, which are expected to be utilized in wearable devices and medical equipment. In the video, you can see how the film, which has excellent elasticity, stretches and contracts. Please check our high technological capabilities and the flexible characteristics that are useful for product development. We hope this will help you generate new ideas in product development. ▼You can watch the video here [Link to the implementation page for stretchable films] https://www.johnan.com/dms/mounting/filmdevic/stretchable/

"Because it's an invisible place, we won't overlook it." Japan's climate is characterized by high temperatures and humidity, and particularly after typhoons and heavy rains, the conditions can be harsh for homes. It's not just the roofs and exterior walls that are affected by rain and wind. The area beneath the floor is actually the most susceptible and often overlooked point. This time, we will explain the "checkpoints for under the floor" that should be confirmed after a typhoon or heavy rain, the "responses" if abnormalities are found, and measures for preventing recurrence. [Table of Contents] ■ Why is underfloor checking necessary? ■ Checkpoints to confirm after a typhoon or heavy rain ■ Responses when damage is discovered ■ Points for preventing recurrence ■ Suggestions from Seihou Products ■ Summary Please be sure to read the [related materials] and [related links]. ↓ ↓ ↓