Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.
This is an electron beam evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The TAU series is a "mini" electron beam evaporation source. By using TAU, the HEX system can be utilized as an electron beam evaporation device (EB evaporation device). The material is heated by applying high voltage to it and accelerating thermal electrons emitted from a filament located right next to it to collide with the material. Unlike large electron beam evaporation sources, it does not use electron beam deflection magnets. Each pocket of the TAU source is equipped with a "flux monitoring plate" as standard, which detects the slight ions contained in the vapor. The ion current value detected here is proportional to the deposition rate and is sensitive enough to precisely grow sub-monolayer films. The TAU-4, which is a simultaneous deposition model with four sources, has independent flux monitoring plates in each of the four pockets, allowing for monitoring of the deposition rate in each pocket during simultaneous deposition. The TAU source can deposit from either a rod or a crucible, depending on the material. We can suggest the optimal deposition method, so please feel free to contact us.
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basic information
Main Specifications Maximum Power: 250W (500W: optional) Flux Monitor: Standard equipment Deposition Material: Rod (maximum diameter 4mm or crucible) Cooling: Water cooling (1L/min)
Price information
It varies depending on the configuration. Please feel free to contact us.
Delivery Time
※It varies depending on the composition. Please feel free to contact us.
Applications/Examples of results
Deposition of high melting point materials, high precision film thickness control, lift-off process, etc.
Line up（2）
| Model number | overview |
|---|---|
| TAU-S | 1 pocket, simultaneous deposition not possible |
| TAU-4 | 4 pockets, simultaneous deposition possible |
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Company information
Tegasaience Co., Ltd. is a specialized trading company for scientific and analytical instruments, headquartered in Kitakashiwa, Kashiwa City, near Lake Tega, where wild birds gather. Founded at the beginning of the 21st century, we have been providing excellent scientific and analytical instruments and precision equipment from Europe and the United States to domestic research institutions. Moving forward, we will continue to strive to contribute to the development of Japan's science and technology, focusing on areas that cannot be covered by domestic products. The bird in Tegasaience Co., Ltd.'s trademark is a colorful arrangement of the Eurasian Coot, which is abundant in Lake Tega.