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  4. 【High Scalability & High Maintainability】Compact Electron Beam Evaporation System / EB Device HEX-TAU【Ideal for R&D!】
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  • Dec 26, 2023
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Dec 26, 2023

【High Scalability & High Maintainability】Compact Electron Beam Evaporation System / EB Device HEX-TAU【Ideal for R&D!】

テガサイエンス テガサイエンス
The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and capable of changing its setup for multiple purposes according to shifts in research direction. It allows for easy configuration changes and functional expansions, much like assembling blocks. The 'HEX-TAU' is an electron beam deposition device based on the multipurpose vacuum deposition device HEX system. It is an optimal vacuum device for depositing high melting point materials, metals, or insulators. It is particularly suitable for applications that require the deposition of very thin films with high control and reproducibility. ◆ Standard Specifications ◆ - Multipurpose vacuum deposition device HEX system - Electron beam deposition source TAU-S or TAU-4 - 80L/s turbo pump and scroll pump - Full-range vacuum gauge - Viewport panel - Fixed sample table - 250W power supply for TAU source - Film thickness gauge (QCM) - Manual shutter ◆ Upgrade Options (Examples) ◆ - Rotating heated sample table - 500W power supply for TAU - Automatic shutter - Additional electron beam deposition sources and power supplies *Please feel free to contact us for more details.*
Multi-purpose vacuum deposition system HEX system
Multi-purpose vacuum deposition system HEX system
Electron Beam Evaporation Source / EB Source TAU
Electron Beam Evaporation Source / EB Source TAU
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Tega Science_Multi-Purpose Vacuum Deposition Device HEX System
Compact vacuum deposition device with excellent versatility and customization.
Tega Science_Electron Beam Deposition Source TAU
Electron beam deposition source for the HEX system. There are a single source model TAU-1 and a four-source simultaneous deposition model TAU-4.

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HEX-main2 550x550.png

Compact! Simultaneous deposition! High expandability! 'Vacuum Deposition Equipment - HEX Series'

A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.

The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.

  • Sputtering Equipment

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Fission_w_bg 550x550.png

Multi-purpose vacuum deposition device sputtering source

Multi-purpose vacuum deposition device HEX system RF & DC sputtering source

This is a sputtering source for the multi-purpose vacuum deposition device HEX/HEX-L. It can be used in DC mode when the target is a conductor and in RF mode when the target is an insulator. With a gas hood as standard equipment, it is possible to increase the pressure near the target surface while keeping the chamber pressure low during film formation. Quick-release connectors are used for the connections of cooling water piping and gas piping, allowing for easy installation and removal of the piping without the need for tools. The Fission source can be fixed to the chamber with four butterfly nuts, eliminating the need for tools during installation and removal. It also supports reactive sputtering, enabling the deposition of oxides and nitrides. Up to three deposition sources can be installed on the HEX and up to six on the HEX-L, allowing for the deposition of multilayer films and compound films.

  • Sputtering Equipment

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Multi-purpose vacuum deposition device with resistance heating deposition source.

Resistance heating evaporation source for the multi-purpose vacuum deposition device HEX system.

This is a resistance heating evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The resistance heating evaporation method is the most common vacuum deposition process. Materials are placed in a boat-type or crucible-type heating container, and by passing current through the heating container, resistance heat is generated to heat the materials. Once the temperature of the heating container rises sufficiently, the materials inside begin to evaporate. The deposition rate can be controlled by the current. The advantage of the resistance heating evaporation device is that it does not use process gases. Therefore, it operates at high vacuum levels, resulting in deposited films containing very few impurities. The TES source is fixed to the chamber with four butterfly nuts. Additionally, the cooling water piping is connected via quick-release connectors, allowing for quick replenishment of materials or replacement of boats/filaments. Up to five TES sources can be installed on the HEX, and up to six on the HEX-L. They can also be used in combination with the sputter source Fission, the electron beam evaporation source TAU, and the organic evaporation source ORCA.

  • Sputtering Equipment

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TAU_w_bg 550x550.png

Multi-purpose vacuum deposition device - Electron beam deposition source

Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.

This is an electron beam evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The TAU series is a "mini" electron beam evaporation source. By using TAU, the HEX system can be utilized as an electron beam evaporation device (EB evaporation device). The material is heated by applying high voltage to it and accelerating thermal electrons emitted from a filament located right next to it to collide with the material. Unlike large electron beam evaporation sources, it does not use electron beam deflection magnets. Each pocket of the TAU source is equipped with a "flux monitoring plate" as standard, which detects the slight ions contained in the vapor. The ion current value detected here is proportional to the deposition rate and is sensitive enough to precisely grow sub-monolayer films. The TAU-4, which is a simultaneous deposition model with four sources, has independent flux monitoring plates in each of the four pockets, allowing for monitoring of the deposition rate in each pocket during simultaneous deposition. The TAU source can deposit from either a rod or a crucible, depending on the material. We can suggest the optimal deposition method, so please feel free to contact us.

  • Sputtering Equipment

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ORCA_w_bg 550x550.png

Multi-purpose vacuum deposition device with organic deposition source

Organic deposition source for the multipurpose vacuum deposition device HEX system.

This is an organic deposition source for the multi-purpose vacuum deposition device HEX/HEX-L. By installing ORCA, the HEX system can be used as an organic material deposition device. The ORCA source actively cools the crucible. The balance between heating and cooling achieves excellent temperature stability and control. The crucible is made of a material with high thermal conductivity, preventing the occurrence of hotspots that could adversely affect the deposition rate. Alumina and graphite liners are also available. The temperature of the crucible is measured by a K-type thermocouple, allowing for more accurate temperature measurements than conventional contact thermocouples. ORCA comes with a power supply unit and a PID controller optimized for low-temperature operation. The ORCA source can be used in combination with sputter sources, electron beam deposition sources, and resistance heating deposition sources. The area around the crucible is covered with a cooled protective cap, minimizing thermal interference from adjacent sources.

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Multi-purpose vacuum deposition device sample stage for HEX

Multipurpose Vacuum Deposition Device HEX System Sample Stage | Fixed, Rotating, Rotating Heating, Rotating Water Cooling

This is a sample stage for the multi-purpose vacuum deposition device HEX/HEX-L. Choosing the correct sample stage is as important as selecting the right film formation method. The characteristics of the sample stage affect uniformity, morphology, and film composition. It accommodates samples with a maximum diameter of 4 inches for HEX and 6 inches for HEX-L. In addition to the standard fixed sample stage, rotating, rotating heated, and rotating water-cooled sample stages are available.

  • Sputtering Equipment

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Related catalog(2)

Vacuum Deposition Device HEX Series Product Catalog

Vacuum Deposition Device HEX Series Product Catalog

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Tabletop Nano Particle Deposition Device 'NL50'

Tabletop Nano Particle Deposition Device 'NL50'

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JBC Soldering News: Online Store for Soldering Equipment Launched

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Finally, the long-awaited JBC brand soldering equipment direct sales online store has been launched. Free shipping nationwide in Japan, and all products of the JBC brand are available for purchase. More than 10 types of soldering tips, with quantity discounts for over 50. From the latest model compact stations to consumables, please be sure to visit our website.

Sep 22, 2025

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The latest API SQ standard has been newly added to the Groud WORKS2 series with '0W-30'.

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The GRAUD WORKS2 series, which uses fully synthetic base oil and has obtained the latest API SQ standard. The '0W-30' has been added to the lineup of the GRAUD WORKS2 series!! < Features > Uses fully synthetic base oil. In addition to the robustness, fuel efficiency, and durability required by the latest API: SQ standard, it also enhances compatibility with seal rubber, reduces LSPI (Low-Speed Pre-Ignition), suppresses timing chain wear, and improves piston cleanliness, making it compatible with GPF. It is a wide-range type engine oil that can be used in a variety of vehicles from compact cars to sports cars. * For more details, please refer to the PDF document or feel free to contact us.

Sep 22, 2025

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Added 'Kansai Expo x Optical Thin Films Episode: 7' to the technology trend keywords.

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The 2025 Osaka-Kansai Expo is a grand stage where cutting-edge technologies and cultures from around the world intersect. In particular, the pavilions of Middle Eastern countries such as Saudi Arabia, the UAE, Qatar, and Oman resemble a miniature future city, showcasing advanced architecture, smart energy, and AI-controlled urban infrastructure, allowing visitors to experience "future urban living." These Middle Eastern countries are actively promoting sustainable urban development and smart city initiatives, with significant expectations for industrial revitalization. Optical filters and thin-film technology can be applied across a wide range of fields, including renewable energy facilities, transportation infrastructure, healthcare, and security. Adachi New Industries aims to support the technological foundation of these future cities and contribute to industrial innovation on a global scale. 【1】 Experiencing the Future City at the Kansai Expo 【2】 The Role of Optical Thin Films in the Revitalization of Middle Eastern Industries 【3】 The Vision of Future Cities Shaped by Optical Technology 【4】 A Bridge of Friendship Through Optical Filters. For more details, please visit our company website.

Sep 22, 2025

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Escape from natural thawing! A rapid thawing solution that preserves the freshness of fruit juice.

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Challenges Before Implementation A company that manufactures and sells confections using juice was naturally thawing fruit juice stored in drums. The thawing process (natural thawing) took 3 to 4 days in summer and over 10 days in winter, occupying a large space within the factory during that time. Additionally, it required personnel to manage the process, which significantly constrained productivity. There were also concerns about the deterioration of the freshness and color of the juice, leading to a demand for a more efficient and high-quality thawing method. Effects of Implementation The implementation was based on confirming the effectiveness through actual machine tests conducted in the Shinagawa test room beforehand. It was confirmed that the thawing of drums with the Proton thawing machine could be completed in one day year-round. Therefore, a customized proposal for the introduction of a large differential pressure rapid thawing machine and storage facility was made, maintaining high quality without compromising the freshness and flavor of 100% juice. Additionally, the need for a dedicated thawing space was eliminated, allowing personnel to be reassigned to other departments, which significantly improved productivity. The thawing machine received high praise for achieving both quality preservation and efficiency simultaneously. *We are preparing a test machine and look forward to your visit. Contact: Mail info@proton-eng.co.jp*

Sep 22, 2025

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Improving the quality retention and yield of mass salmon roe! The 'Proton Defroster' thaws hygienically and evenly.

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The "Proton Defroster" is a system that can defrost delicate fish roe, such as mass salmon roe and red salmon roe, which are sensitive to temperature changes, in a high-quality and hygienic manner. In conventional methods, high temperatures and long operation times were unavoidable, leading to uneven defrosting. Additionally, tanks placed outdoors were difficult to clean and had hygiene issues, such as mold growth. The "Proton Defroster" uses a steam boiler as its heat source, allowing for uniform defrosting in a low-temperature, high-humidity environment with 100% humidity. It eliminates uneven defrosting and prevents color fading and flavor deterioration. With efficient heat transfer through the latent heat of steam condensation, the color of the fish roe remains vibrant, and the flesh stays firm during defrosting. As a result, in the cleaning and trimming processes (deveining), the roe is less likely to be crushed, enhancing the effectiveness of enzyme treatment, improving yield, and increasing work efficiency. The Proton Defroster, which preserves color, shape, and texture without compromising freshness and quality, greatly contributes to quality control and product value enhancement in the seafood processing industry. *We have a test machine ready and look forward to your visit. Inquiries: Tel: 03-6423-0478 Reception hours: 9:00 AM to 6:00 PM, Monday to Friday (excluding public holidays and year-end/New Year holidays)

Sep 22, 2025

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