【High Scalability & High Maintainability】Compact Electron Beam Evaporation System / EB Device HEX-TAU【Ideal for R&D!】

The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and capable of changing its setup for multiple purposes according to shifts in research direction. It allows for easy configuration changes and functional expansions, much like assembling blocks.
The 'HEX-TAU' is an electron beam deposition device based on the multipurpose vacuum deposition device HEX system.
It is an optimal vacuum device for depositing high melting point materials, metals, or insulators. It is particularly suitable for applications that require the deposition of very thin films with high control and reproducibility.
◆ Standard Specifications ◆
- Multipurpose vacuum deposition device HEX system
- Electron beam deposition source TAU-S or TAU-4
- 80L/s turbo pump and scroll pump
- Full-range vacuum gauge
- Viewport panel
- Fixed sample table
- 250W power supply for TAU source
- Film thickness gauge (QCM)
- Manual shutter
◆ Upgrade Options (Examples) ◆
- Rotating heated sample table
- 500W power supply for TAU
- Automatic shutter
- Additional electron beam deposition sources and power supplies
*Please feel free to contact us for more details.*


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Compact vacuum deposition device with excellent versatility and customization.
Electron beam deposition source for the HEX system. There are a single source model TAU-1 and a four-source simultaneous deposition model TAU-4.