Compact! Simultaneous deposition! High expandability! 'Vacuum Deposition Equipment - HEX Series'
HEX system
A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.
The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.
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basic information
The HEX system is equipped with four types of deposition sources: sputtering source, resistance heating evaporation source, electron beam evaporation source, and organic material evaporation source, allowing for the simultaneous installation of up to three units. It accommodates a wide range of applications, from simple coatings to complex multilayer films. With a very compact vacuum chamber that fits within 60cm x 60cm, it can be installed on a power rack or laboratory bench. Additionally, when combined with a glove box, it can handle applications requiring the deposition of anaerobic materials such as lithium-ion batteries.
Price information
It varies depending on the composition. Please feel free to contact us.
Delivery Time
※It varies depending on the composition. Please feel free to contact us.
Applications/Examples of results
Vacuum film deposition using sputtering, resistance heating evaporation, electron beam evaporation, and organic material deposition. By incorporating it into an existing glove box, it can also accommodate the deposition of anaerobic materials (such as lithium).
Detailed information
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<Structure of the HEX System> The vacuum chamber is constructed by attaching panels to the six sides of a hexagonal aluminum frame and the top and bottom surfaces. A sample table and a turbo molecular pump are installed on the top and bottom surfaces. The side panels come in several types, including blank panels, viewport panels, source panels, and gas introduction panels. By combining these panels, various configurations of the vacuum chamber can be achieved.
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<Film Formation Sources> Four types of film formation sources are available: sputtering source, resistance heating evaporation source, electron beam evaporation source, and organic evaporation source. They are fixed to the source panel with four bolts, making it easy to install and remove. Gas connections and cooling water connections also use quick connectors, so no tools are required.
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<Simultaneous Deposition> In HEX, up to 3 film deposition sources can be installed for simultaneous deposition, while in HEX-L, up to 6 sources can be used. The number and position of the installation ports can be freely changed.
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<Sample Table> You can upgrade from the standard fixed sample table to the rotating, rotating heating, and rotating water cooling sample tables. It supports samples up to 4 inches in HEX and up to 6 inches in HEX-L.
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<Compact Design> The HEX system's chamber can be installed in a space of about 60cm square. It can be placed on a typical laboratory bench, so there is no need to worry about the installation location when considering its introduction.
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<Control Software> You can remotely control various parameters from a virtual rack on the software interface. Chart display and data logging are also possible. It is a unique and powerful control software that allows for intuitive operation.
Line up（2）
| Model number | overview |
|---|---|
| HEX | Maximum substrate size 4 inches, maximum number of deposition sources 3, achievable vacuum level 5E-4Pa |
| HEX-L | Maximum substrate size 6 inches, maximum number of deposition sources 6, achievable vacuum level 5E-4Pa |
catalog（2）
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Company information
Tegasaience Co., Ltd. is a specialized trading company for scientific and analytical instruments, headquartered in Kitakashiwa, Kashiwa City, near Lake Tega, where wild birds gather. Founded at the beginning of the 21st century, we have been providing excellent scientific and analytical instruments and precision equipment from Europe and the United States to domestic research institutions. Moving forward, we will continue to strive to contribute to the development of Japan's science and technology, focusing on areas that cannot be covered by domestic products. The bird in Tegasaience Co., Ltd.'s trademark is a colorful arrangement of the Eurasian Coot, which is abundant in Lake Tega.