【Ideal for Anoxic Material Deposition!!!】 Vacuum Deposition Device HEX-GB Compatible with Glove Boxes 【For Lithium-Ion Batteries and More】

The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and to allow for versatile configuration changes in response to shifts in research direction. It can be easily modified or expanded in functionality by assembling blocks, much like building with construction toys.
The multipurpose vacuum deposition device, HEX system, can be integrated into new or existing glove boxes. It is ideal for anaerobic film deposition experiments, such as those involving lithium-ion batteries.
Only the sample table part of the HEX system enters the glove box, while the chamber part is fixed in a suspended manner at the bottom of the glove box, allowing for easy sample exchange and system maintenance from the atmosphere side.
The HEX system can accommodate up to three deposition sources, enabling the combination of sputtering sources, resistance heating evaporation sources, electron beam evaporation sources, and organic evaporation sources for film deposition.
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Compact vacuum deposition device with excellent versatility and customizability
Sputtering source for the HEX system. Supports DC and RF sputtering
Resistance heating deposition source for the HEX system
Electron beam deposition source for the HEX system. 1 source and 4 sources (simultaneous deposition possible)
Organic deposition source for the HEX system.