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  4. 【Ideal for Anoxic Material Deposition!!!】 Vacuum Deposition Device HEX-GB Compatible with Glove Boxes 【For Lithium-Ion Batteries and More】
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  • Dec 26, 2023
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Dec 26, 2023

【Ideal for Anoxic Material Deposition!!!】 Vacuum Deposition Device HEX-GB Compatible with Glove Boxes 【For Lithium-Ion Batteries and More】

テガサイエンス テガサイエンス
The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and to allow for versatile configuration changes in response to shifts in research direction. It can be easily modified or expanded in functionality by assembling blocks, much like building with construction toys. The multipurpose vacuum deposition device, HEX system, can be integrated into new or existing glove boxes. It is ideal for anaerobic film deposition experiments, such as those involving lithium-ion batteries. Only the sample table part of the HEX system enters the glove box, while the chamber part is fixed in a suspended manner at the bottom of the glove box, allowing for easy sample exchange and system maintenance from the atmosphere side. The HEX system can accommodate up to three deposition sources, enabling the combination of sputtering sources, resistance heating evaporation sources, electron beam evaporation sources, and organic evaporation sources for film deposition. *For more details, please feel free to contact us.*
Multi-purpose vacuum deposition system HEX system
Multi-purpose vacuum deposition system HEX system
It can be installed in various glove boxes.
It can be installed in various glove boxes.
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Tega Science_Multi-Purpose Vacuum Deposition Device HEX System
Compact vacuum deposition device with excellent versatility and customizability
Tega Science_Sputtering Source Fission
Sputtering source for the HEX system. Supports DC and RF sputtering
Tega Science_Resistance Heating Deposition Source TES
Resistance heating deposition source for the HEX system
Tega Science_Electron Beam Deposition Source TAU
Electron beam deposition source for the HEX system. 1 source and 4 sources (simultaneous deposition possible)
Tega Science_Organic Deposition Source ORCA
Organic deposition source for the HEX system.

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HEX-main2 550x550.png

Compact! Simultaneous deposition! High expandability! 'Vacuum Deposition Equipment - HEX Series'

A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.

The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.

  • Sputtering Equipment

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Fission_w_bg 550x550.png

Multi-purpose vacuum deposition device sputtering source

Multi-purpose vacuum deposition device HEX system RF & DC sputtering source

This is a sputtering source for the multi-purpose vacuum deposition device HEX/HEX-L. It can be used in DC mode when the target is a conductor and in RF mode when the target is an insulator. With a gas hood as standard equipment, it is possible to increase the pressure near the target surface while keeping the chamber pressure low during film formation. Quick-release connectors are used for the connections of cooling water piping and gas piping, allowing for easy installation and removal of the piping without the need for tools. The Fission source can be fixed to the chamber with four butterfly nuts, eliminating the need for tools during installation and removal. It also supports reactive sputtering, enabling the deposition of oxides and nitrides. Up to three deposition sources can be installed on the HEX and up to six on the HEX-L, allowing for the deposition of multilayer films and compound films.

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TES_w_bg 550x550.png

Multi-purpose vacuum deposition device with resistance heating deposition source.

Resistance heating evaporation source for the multi-purpose vacuum deposition device HEX system.

This is a resistance heating evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The resistance heating evaporation method is the most common vacuum deposition process. Materials are placed in a boat-type or crucible-type heating container, and by passing current through the heating container, resistance heat is generated to heat the materials. Once the temperature of the heating container rises sufficiently, the materials inside begin to evaporate. The deposition rate can be controlled by the current. The advantage of the resistance heating evaporation device is that it does not use process gases. Therefore, it operates at high vacuum levels, resulting in deposited films containing very few impurities. The TES source is fixed to the chamber with four butterfly nuts. Additionally, the cooling water piping is connected via quick-release connectors, allowing for quick replenishment of materials or replacement of boats/filaments. Up to five TES sources can be installed on the HEX, and up to six on the HEX-L. They can also be used in combination with the sputter source Fission, the electron beam evaporation source TAU, and the organic evaporation source ORCA.

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TAU_w_bg 550x550.png

Multi-purpose vacuum deposition device - Electron beam deposition source

Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.

This is an electron beam evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The TAU series is a "mini" electron beam evaporation source. By using TAU, the HEX system can be utilized as an electron beam evaporation device (EB evaporation device). The material is heated by applying high voltage to it and accelerating thermal electrons emitted from a filament located right next to it to collide with the material. Unlike large electron beam evaporation sources, it does not use electron beam deflection magnets. Each pocket of the TAU source is equipped with a "flux monitoring plate" as standard, which detects the slight ions contained in the vapor. The ion current value detected here is proportional to the deposition rate and is sensitive enough to precisely grow sub-monolayer films. The TAU-4, which is a simultaneous deposition model with four sources, has independent flux monitoring plates in each of the four pockets, allowing for monitoring of the deposition rate in each pocket during simultaneous deposition. The TAU source can deposit from either a rod or a crucible, depending on the material. We can suggest the optimal deposition method, so please feel free to contact us.

  • Sputtering Equipment

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ORCA_w_bg 550x550.png

Multi-purpose vacuum deposition device with organic deposition source

Organic deposition source for the multipurpose vacuum deposition device HEX system.

This is an organic deposition source for the multi-purpose vacuum deposition device HEX/HEX-L. By installing ORCA, the HEX system can be used as an organic material deposition device. The ORCA source actively cools the crucible. The balance between heating and cooling achieves excellent temperature stability and control. The crucible is made of a material with high thermal conductivity, preventing the occurrence of hotspots that could adversely affect the deposition rate. Alumina and graphite liners are also available. The temperature of the crucible is measured by a K-type thermocouple, allowing for more accurate temperature measurements than conventional contact thermocouples. ORCA comes with a power supply unit and a PID controller optimized for low-temperature operation. The ORCA source can be used in combination with sputter sources, electron beam deposition sources, and resistance heating deposition sources. The area around the crucible is covered with a cooled protective cap, minimizing thermal interference from adjacent sources.

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sample_table_w_bg 550x550.png

Multi-purpose vacuum deposition device sample stage for HEX

Multipurpose Vacuum Deposition Device HEX System Sample Stage | Fixed, Rotating, Rotating Heating, Rotating Water Cooling

This is a sample stage for the multi-purpose vacuum deposition device HEX/HEX-L. Choosing the correct sample stage is as important as selecting the right film formation method. The characteristics of the sample stage affect uniformity, morphology, and film composition. It accommodates samples with a maximum diameter of 4 inches for HEX and 6 inches for HEX-L. In addition to the standard fixed sample stage, rotating, rotating heated, and rotating water-cooled sample stages are available.

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Related catalog(2)

Vacuum Deposition Device HEX Series Product Catalog

Vacuum Deposition Device HEX Series Product Catalog

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  • E-book viewing
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Contact this catalog

Tabletop Nano Particle Deposition Device 'NL50'

Tabletop Nano Particle Deposition Device 'NL50'

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  • E-book viewing
  • Catalog download

Contact this catalog

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

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Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Mar 23, 2026

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YONEX Co., Ltd. Badminton Motion Capture Experience Report

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From July 15 (Tuesday) to July 20 (Sunday), 2025, the "42nd Daihatsu Japan Open 2025 Badminton Championships" was held at the Tokyo Metropolitan Gymnasium. We would like to report on the motion capture experience session conducted by Yonex Co., Ltd. at the venue. During the experience session, participants were asked to swing three different types of rackets from different generations, focusing on whether there were differences in their top speeds. The measurement was conducted using the same Raptor-12HS system utilized at the Yonex Performance Innovation Center (Blue Lab). This was a valuable opportunity to experience the research equipment that is not currently open to the public and to see what kind of measurements are being conducted! ---[Yonex Co., Ltd. Experience Session Report Here]--- https://info.nacinc.jp/report_yonex_badminton_motioncapture -------------------------------------------------------------------------

Mar 23, 2026

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Hyper CLT flooring panel (NETIS number: TH-250021-A)

Fully circular temporary materials contributing to CO2 reduction (NETIS number: TH-250021-A)

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Hello, this is the public relations department of KAITAKU Co., Ltd. in Okayama City, Okayama Prefecture! Recently, our wooden lightweight hyper CLT sheet has been officially registered with the Ministry of Land, Infrastructure, Transport and Tourism (NETIS number: TH-250021-A). The decisive difference between hyper CLT sheets and conventional temporary materials lies in the "exit" after their durability period ends. The hyper CLT sheet (NETIS number: TH-250021-A) is not discarded after its role on site is finished; instead, it is reused as chip fuel for biomass power generation. • Made: It is made from **wood (thinned timber)**, resulting in low environmental impact. • Used: It significantly contributes to reducing CO2 on site. • Converted to energy: Once its durability period is over, it becomes chip fuel for biomass power generation, ensuring that no resources are wasted. In this way, a **"complete circular" system** is established that connects materials to energy. Additionally, these initiatives can serve as a strong appeal for creativity related to construction performance. Please try the hyper CLT sheet (NETIS number: TH-250021-A)!

Mar 23, 2026

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Hotron Group Case Page

[Case Study] Hotron pursues sensor technology and creates products that generate safe and comfortable living spaces. We would like to introduce Hotron products that support people's lives throughout the city.

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We will introduce the implementation results of the sensor technology developed by the Hotron Group, which has been cultivated over more than half a century, through customer case studies. In addition to automatic door sensors, we also offer a wide range of vehicle detection sensors and nursing/care sensors. Many implementation examples are also presented, so please take a look at the case study page.

Mar 23, 2026

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■■ Air Leak Tester | FLA-0200 / FLA-0201 series ■■ Fukuda's new flagship model. Equipped with mastering correction function, it enables high-precision measurements in a short time.

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Fukuda's new flagship model. - Masterless type (FLA-0200 series) - General type (FLA-0201 series) Two models of air leak testers. With the mastering correction function, high-precision measurements can be achieved in a short time. Please take a look at the catalog.

Mar 23, 2026

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