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  4. 【Ideal for Anoxic Material Deposition!!!】 Vacuum Deposition Device HEX-GB Compatible with Glove Boxes 【For Lithium-Ion Batteries and More】
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  • Dec 26, 2023
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Dec 26, 2023

【Ideal for Anoxic Material Deposition!!!】 Vacuum Deposition Device HEX-GB Compatible with Glove Boxes 【For Lithium-Ion Batteries and More】

テガサイエンス テガサイエンス
The HEX system is a compact vacuum device with a minimum installation area of 60 cm square, designed to be introduced with a minimal configuration and to allow for versatile configuration changes in response to shifts in research direction. It can be easily modified or expanded in functionality by assembling blocks, much like building with construction toys. The multipurpose vacuum deposition device, HEX system, can be integrated into new or existing glove boxes. It is ideal for anaerobic film deposition experiments, such as those involving lithium-ion batteries. Only the sample table part of the HEX system enters the glove box, while the chamber part is fixed in a suspended manner at the bottom of the glove box, allowing for easy sample exchange and system maintenance from the atmosphere side. The HEX system can accommodate up to three deposition sources, enabling the combination of sputtering sources, resistance heating evaporation sources, electron beam evaporation sources, and organic evaporation sources for film deposition. *For more details, please feel free to contact us.*
Multi-purpose vacuum deposition system HEX system
Multi-purpose vacuum deposition system HEX system
It can be installed in various glove boxes.
It can be installed in various glove boxes.
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Tega Science_Multi-Purpose Vacuum Deposition Device HEX System
Compact vacuum deposition device with excellent versatility and customizability
Tega Science_Sputtering Source Fission
Sputtering source for the HEX system. Supports DC and RF sputtering
Tega Science_Resistance Heating Deposition Source TES
Resistance heating deposition source for the HEX system
Tega Science_Electron Beam Deposition Source TAU
Electron beam deposition source for the HEX system. 1 source and 4 sources (simultaneous deposition possible)
Tega Science_Organic Deposition Source ORCA
Organic deposition source for the HEX system.

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HEX-main2 550x550.png

Compact! Simultaneous deposition! High expandability! 'Vacuum Deposition Equipment - HEX Series'

A versatile vacuum deposition device that allows for flexible configuration changes like assembling blocks | Sputtering, resistance heating deposition, electron beam deposition, organic deposition.

The HEX system features a unique "modular structure." By exchanging the panels that make up each face of the hexagonal prism-shaped chamber, you can freely change the number and arrangement of ports. As a result, you can easily modify the configuration and expand functionality, much like assembling blocks, in response to changes in research direction. The HEX system is a compact and highly expandable vacuum deposition device that fills the gap between benchtop systems and UHV systems, based on a new concept. ◆ The "modular structure" allows for flexible changes to the system configuration ◆ Supports sputtering, resistance heating deposition, electron beam deposition, and organic deposition ◆ Supports simultaneous film formation from multiple sources ◆ Compatible with sample rotation, heating, and water cooling ◆ Can be equipped with a film thickness monitor ◆ Compact design with a footprint of 60cm x 60cm ◆ Excellent expandability and maintainability ◆ Compatible with glove boxes (for lithium-ion batteries, etc.) For more details, please refer to the catalog available for download as a PDF. If you have any questions, please feel free to contact us.

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Fission_w_bg 550x550.png

Multi-purpose vacuum deposition device sputtering source

Multi-purpose vacuum deposition device HEX system RF & DC sputtering source

This is a sputtering source for the multi-purpose vacuum deposition device HEX/HEX-L. It can be used in DC mode when the target is a conductor and in RF mode when the target is an insulator. With a gas hood as standard equipment, it is possible to increase the pressure near the target surface while keeping the chamber pressure low during film formation. Quick-release connectors are used for the connections of cooling water piping and gas piping, allowing for easy installation and removal of the piping without the need for tools. The Fission source can be fixed to the chamber with four butterfly nuts, eliminating the need for tools during installation and removal. It also supports reactive sputtering, enabling the deposition of oxides and nitrides. Up to three deposition sources can be installed on the HEX and up to six on the HEX-L, allowing for the deposition of multilayer films and compound films.

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TES_w_bg 550x550.png

Multi-purpose vacuum deposition device with resistance heating deposition source.

Resistance heating evaporation source for the multi-purpose vacuum deposition device HEX system.

This is a resistance heating evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The resistance heating evaporation method is the most common vacuum deposition process. Materials are placed in a boat-type or crucible-type heating container, and by passing current through the heating container, resistance heat is generated to heat the materials. Once the temperature of the heating container rises sufficiently, the materials inside begin to evaporate. The deposition rate can be controlled by the current. The advantage of the resistance heating evaporation device is that it does not use process gases. Therefore, it operates at high vacuum levels, resulting in deposited films containing very few impurities. The TES source is fixed to the chamber with four butterfly nuts. Additionally, the cooling water piping is connected via quick-release connectors, allowing for quick replenishment of materials or replacement of boats/filaments. Up to five TES sources can be installed on the HEX, and up to six on the HEX-L. They can also be used in combination with the sputter source Fission, the electron beam evaporation source TAU, and the organic evaporation source ORCA.

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TAU_w_bg 550x550.png

Multi-purpose vacuum deposition device - Electron beam deposition source

Multi-purpose vacuum deposition device for HEX system with 1-source and 4-source electron beam deposition sources.

This is an electron beam evaporation source for the multi-purpose vacuum deposition device HEX/HEX-L. The TAU series is a "mini" electron beam evaporation source. By using TAU, the HEX system can be utilized as an electron beam evaporation device (EB evaporation device). The material is heated by applying high voltage to it and accelerating thermal electrons emitted from a filament located right next to it to collide with the material. Unlike large electron beam evaporation sources, it does not use electron beam deflection magnets. Each pocket of the TAU source is equipped with a "flux monitoring plate" as standard, which detects the slight ions contained in the vapor. The ion current value detected here is proportional to the deposition rate and is sensitive enough to precisely grow sub-monolayer films. The TAU-4, which is a simultaneous deposition model with four sources, has independent flux monitoring plates in each of the four pockets, allowing for monitoring of the deposition rate in each pocket during simultaneous deposition. The TAU source can deposit from either a rod or a crucible, depending on the material. We can suggest the optimal deposition method, so please feel free to contact us.

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ORCA_w_bg 550x550.png

Multi-purpose vacuum deposition device with organic deposition source

Organic deposition source for the multipurpose vacuum deposition device HEX system.

This is an organic deposition source for the multi-purpose vacuum deposition device HEX/HEX-L. By installing ORCA, the HEX system can be used as an organic material deposition device. The ORCA source actively cools the crucible. The balance between heating and cooling achieves excellent temperature stability and control. The crucible is made of a material with high thermal conductivity, preventing the occurrence of hotspots that could adversely affect the deposition rate. Alumina and graphite liners are also available. The temperature of the crucible is measured by a K-type thermocouple, allowing for more accurate temperature measurements than conventional contact thermocouples. ORCA comes with a power supply unit and a PID controller optimized for low-temperature operation. The ORCA source can be used in combination with sputter sources, electron beam deposition sources, and resistance heating deposition sources. The area around the crucible is covered with a cooled protective cap, minimizing thermal interference from adjacent sources.

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Multi-purpose vacuum deposition device sample stage for HEX

Multipurpose Vacuum Deposition Device HEX System Sample Stage | Fixed, Rotating, Rotating Heating, Rotating Water Cooling

This is a sample stage for the multi-purpose vacuum deposition device HEX/HEX-L. Choosing the correct sample stage is as important as selecting the right film formation method. The characteristics of the sample stage affect uniformity, morphology, and film composition. It accommodates samples with a maximum diameter of 4 inches for HEX and 6 inches for HEX-L. In addition to the standard fixed sample stage, rotating, rotating heated, and rotating water-cooled sample stages are available.

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Related catalog(2)

Vacuum Deposition Device HEX Series Product Catalog

Vacuum Deposition Device HEX Series Product Catalog

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  • E-book viewing
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Contact this catalog

Tabletop Nano Particle Deposition Device 'NL50'

Tabletop Nano Particle Deposition Device 'NL50'

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Non-contact light touch sensor "HA-T401/HA-T520"

A non-contact light touch sensor "HA-T Series" that realizes "wanting to open in a narrower range and in a limited manner" based on the surrounding environment of automatic doors.

  • NEW
  • PRODUCT

The non-contact beam touch sensor "HA-T401/HA-T520" has a compact detection range, making it an ideal automatic door sensor for installation on automatic doors facing narrow corridors or busy streets. Depending on the application and installation location, you can choose between "non-vision mounting type" and "non-vision built-in type." 【Features】 ● With the beam touch sensor, you can open and close the automatic door simply by bringing your hand close without touching it, ensuring hygiene. ● Depending on the installation environment, such as single sliding or bi-parting doors, the detection range can be set in four ways: left, center, right, with 4 spots and 12 spots settings. ● Two types of activation row settings are available to reduce unnecessary opening and closing of the automatic door due to cross traffic, contributing to energy-saving effects. ● The touch switch and infrared sensor are integrated, allowing for a switch between beam touch and infrared sensor modes with a single model. 【Recommended for such places!】 ☑ Entrances facing busy corridors ☑ Counters or signs near the door ☑ Buildings facing narrow corridors ☑ Buildings that prioritize aesthetics ☑ Hospitals and facilities that consider hygiene ☑ Large facilities with many doors ◎ For more details, please download the materials or contact us.

Aug 07, 2025

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HK-2

Recommended for earthquake measures for automatic doors and equipment! Seismic device HK-2.

  • NEW
  • PRODUCT

Japan is among the top 10 countries in the world with frequent earthquakes. The 2020 White Paper on Land, Infrastructure, Transport and Tourism has also reported an increase in the probability of significant earthquakes occurring. For the Nankai Trough earthquake, the probability of an earthquake with a magnitude of 8 to 9 occurring within the next 30 years is estimated to be 70 to 80%. At Hotron, we recommend the introduction of seismic devices for earthquake measures in buildings and equipment. The seismic device 'HK-2' is a product that automatically performs various controls that have been pre-set when it detects strong shaking equivalent to a seismic intensity of 5 lower or higher. For example, it can automatically execute actions such as: "Open automatic doors and gates to secure evacuation routes and access for emergency vehicles" "Transmit signals to the control room and stop facility equipment" "Unlock the keys to locked lockers" "Automatically play voice guidance" ◎ For more details, please download the materials or contact us.

Aug 06, 2025

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Notice of Product Manufacturing and Sales Termination (TIC Company Dispensers and Peripheral Equipment)

  • NEW
  • PRODUCT

Dear Sir/Madam, I would like to express my sincere congratulations on your continued prosperity. I also wish to extend my heartfelt gratitude for your exceptional support. Now, I regret to inform you that we will be discontinuing the manufacturing and sales of the following product, which you have long supported. ■ Product in question: TIC Corporation's tubing dispenser and hand switch ■ Product page: For product details, click here ■ Discontinuation date: End of July 2025 ■ Alternative product: MCRP type roller pump / pen-type hand switch If you have any questions regarding this matter, please feel free to contact our representative. We sincerely hope for your continued patronage in the future. Thank you very much.

Aug 06, 2025

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Notice of current delivery time: Approximately 4 weeks for the model starting from August 2025. Delivery time for other models is approximately 2 to 3 months.

  • NEW
  • COMPANY

The delivery time for the following models is currently about 4 weeks. - Standard specification model with full scale from 2 mL/min to 500 L/min (M/MB/MC series) - Low pressure loss model with full scale from 2 mL/min to 100 L/min (MW/MWB/MCW series) *Delivery times may vary depending on the type of options, so please inquire. *The delivery time for the controller may vary depending on pressure conditions, so please inquire. The delivery time for other models is approximately 2 to 3 months. For more details, please request a quote or consultation.

Aug 06, 2025

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Other Companies EOL Piezo Buzzer Cross Reference Table (July Updated Version)

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At Same Sky, we continuously manufacture and sell magnetic buzzers and piezo buzzers. Among them, we have received numerous inquiries about the EOL products of piezo buzzers made by Murata Manufacturing, so we have listed our products that are considered to be as close as possible.

Aug 06, 2025

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