Improvement of inert gas purity: Gas purifiers (argon, nitrogen, helium, etc.)
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Inline ultra-high purity gas purifier Fine Purifier (for nitrogen, argon, helium, etc.) for improving the purity of inert gases.
Purifies various impurities (O2, CO2, H2O, CO) in inert gases (nitrogen, argon, helium, neon, xenon, krypton) to below 1 ppb. The flow rate range is up to 300 NL/min. Standard equipped with a 0.003 µm particle filter. It can be reused by regeneration.
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basic information
Purifies various impurities in inert gases (nitrogen, argon, helium, neon, xenon, krypton) to below 1 ppb. The flow rate range is up to 300 NL/min. Equipped with a 0.003 µm particle filter as standard. It can be reused by regeneration.
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Applications/Examples of results
It is used for semiconductor manufacturing equipment, analysis equipment for carrier and zero gas, and for atmosphere adjustment.
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Company information
Osaka Gas Liquid Co., Ltd. was established in 1991 as a wholly-owned subsidiary of Osaka Gas. The company focuses on the manufacturing and sales of industrial gases and dry ice utilizing the cold energy from liquefied natural gas (LNG) imported by Osaka Gas, as well as developing low-temperature grinding using liquefied nitrogen and related industrial gas technologies in collaboration with group companies.