A semiconductor device appearance inspection system that achieves high-speed and high-precision inspection through high-speed autofocus functionality.
Semiconductor device appearance inspection equipment (with high-speed autofocus function) Supports inline/offline operation
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【Features】 - Automatic inspection of all items for semiconductor devices (wafer chips) - High-speed processing: 1 second per field of view measurement (including XY movement and autofocus control) - Supports inline and offline operation - Flexible camera configuration options based on inspection targets and items - Equipped with comprehensive inspection result data management functions - Reference specifications: - Measurement field: 5mm x 6mm, image resolution: 2.5μm, autofocus accuracy: ±1μm - Inspection functions: - Measurement of pattern defects, burrs/line width/pitch width, scratches, dirt, and foreign matter adhesion ● For other functions and details, please contact us.
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Throughout history, humanity has built up civilization, seeking the next level of lifestyle and measuring technological innovation. At the same time, there is a call to reconsider the Earth's environment and human hearts and cultures. We seek romance in the "advancement of science and technology" and "harmony in human life," and we will devote our limitless creative power to the provision of services, information, and technology, becoming "one body with different forms."
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