Dual-side mask aligner for 300mm wafers, ideal for re-wiring processing.
In-house developed diffraction light reduction optical system, adopting WEC system.
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basic information
【Features】 ■ A double-sided mask aligner for 300mm wafers, optimal for processing bumps and re-routing required for essential TVS and wafer-level packaging with cutting-edge 3D stacked packaging technology. ■ Alignment accuracy of 0.5μm @ 3σ □ For more details, please refer to the catalog.
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Zeus Microtech is one of the world's leading suppliers of microfabrication equipment, boasting over 70 years of engineering experience in the semiconductor industry and its related markets. We offer a wide range of products and solutions for lithography, wafer bonding, and photomask processing in semiconductor backend processes, as well as associated micro-optics components. Zeus Microtech continues to provide equipment that offers excellent performance/cost-effectiveness, accommodates special specifications, and flexibly adapts to diverse and rapidly changing manufacturing environments in markets such as MEMS, LEDs, advanced packaging, three-dimensional stacking, power semiconductors, and nanotechnology.