Ion Implantation Device Disk Rejuvenation Service
Ion Implantation Device Disk Rejuvenation Service
Ion Implantation Device Disk Rejuvenation Service
The end station disk of the ion implantation device experiences issues such as particle adhesion to the wafer, elemental-level contamination, reduced cooling capacity due to the aging of elastomers, and problems with wafer detachment due to prolonged ion irradiation. Regular disk regeneration can lead to improved equipment uptime and product yield.
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basic information
Core Corporation has over 15 years of experience in disk regeneration for ion implantation systems worldwide. With 19 ion implantation systems in its own factory, it is the number one company in ion implantation services. Being a company that knows ion implantation systems inside and out, we provide optimal disk regeneration at low costs. We support various types of equipment, so please feel free to contact us.
Price range
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Applications/Examples of results
High current ion implantation device High energy implantation device
Company information
We are a trading company that provides the sale of semiconductor manufacturing equipment, inspection equipment, and components for semiconductor manufacturing both domestically and internationally, as well as technical support and cost reduction in device manufacturing.
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