Ion Implantation Device Disk Reclamation Service

A service that offers high-quality disc playback at a low price.

The "Ion Implantation Equipment Disk Renewal Service" is a service provided by Core Systems that offers full renewal of batch-type implant disks for all manufacturers including Varian, SEN, and AMAT, as well as repair of heat sink renewal disks and sales of parts such as Finger and Restraint. Batch-type end station disks for high-current and high-energy ion implantation equipment can experience issues that cannot be overlooked in management, such as particle adhesion to wafers due to prolonged ion irradiation, elemental-level contamination, reduced cooling capacity due to aging of elastomers, and problems with wafer attachment and detachment. It is necessary to regularly perform disk renewal, including parts cleaning and elastomer replacement, to prevent these issues before they arise. We provide high-quality disk renewal at a low price. 【Features】 ■ Compatible with ion implantation equipment from various manufacturers ■ Provides wafer interfaces that are equivalent to or better than OEM specifications ■ Offered at significantly lower prices than purchasing new parts *For more details, please contact us or download the catalog.

Ion implantation equipment