World's smallest class ECR electron and ion source series, such as TES-40.
TES-40/TES-63/TES-GO/TES-100
Kyushu Measuring Instruments is the only authorized dealer in Japan.
CAMECA (formerly Polygon Physics) TES series is an ECR electron and ion source that achieves highly stable electron and ion beams. Its filament-free, cooling-free compact design ensures high stability and low maintenance. It is suitable for a wide range of applications including etching, sputtering, surface modification, and mass analysis.
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basic information
⚫︎ Method: ECR (Electron Cyclotron Resonance) ⚫︎ Compatible Models: TES-40, TES-63, TES-GO, TES-100 ⚫︎ Beam: Electron Beam / Ion Beam ⚫︎ Acceleration Voltage: 0.1 to 30 kV (depending on the model) ⚫︎ Compatible Gases: H₂, He, N₂, O₂, Ar, Xe, etc. * The types of gases, ions, and operating conditions that can be supported vary by model and application. ⚫︎ Functions: Pulse Mode, Bipolar Mode (optional) ⚫︎ Features: Filamentless, No Cooling Required, Low Maintenance * Specifications and supported functions vary by model and configuration. Please contact us for details.
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Kyushu Measurement Instruments is the only official distributor in Japan for the CAMECA (formerly Polygon Physics) electron and ion source series. With a sales and technical support system in collaboration with the manufacturer, we provide assistance from product selection to post-installation follow-up. If you are considering CAMECA electron and ion sources in Japan, please feel free to consult with Kyushu Measurement Instruments.
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Since our establishment in 1973, we have been involved in the manufacturing industry in Kyushu, focusing on the sales of electronic measuring instruments and contract development. Utilizing our expertise in analog circuit design, we have developed and manufactured various custom (one-of-a-kind) measurement systems and software. We aim to elevate the "technical capabilities" we have accumulated into our own developed products and announce products that can only be created by a "measurement instrument company." In terms of sales of measuring instruments, we cover the entire Kyushu area as an agent for major domestic and international measuring instrument manufacturers. It is both a pride and a joy to be able to contribute to your success by providing essential measurement technology for research and development and problem-solving. All of our employees will continue to strive with the spirit of "daily renewal and progress." We look forward to your continued support.

