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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Etching Equipment
  6. Exhaust Gas Treatment Set ES-F1

Exhaust Gas Treatment Set ES-F1

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ES-F1

last updated:Dec 17, 2010

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Removal of gases and vapors generated during etching.

Activated carbon for ferric chloride etching solution that adsorbs odors and acids, exhaust gas treatment set.

    Etching EquipmentVentilation and Exhaust
4.jpg

Exhaust Gas Treatment Set ES-F1

4.jpg
4.jpg
  • Related Link - http://www.sunhayato.co.jp/products/details.php?u=…

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basic information

【Features】 ■ Activated carbon for ferric chloride etching solution adsorbs unpleasant odors and acids ■ Easily fits and attaches to the exhaust port of the etching machine ■ Uses a dry filter for easy replacement ■ The cost of the activated carbon cassette is approximately 25 yen per hour, making it economical ■ Activated carbon cassette lifespan: 150 hours ■ Exhaust air volume: approximately 35L/min ■ Exhaust duct length: within 2m ■ Waterproof fan: built-in overload protection circuit (current cut-off method used) ■ Dimensions and weight: 250φ×340mmh, approximately 5kg ■ Power supply: AC100V 50/60Hz, approximately 2W □ For other functions and details, please refer to the catalog.

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【Purpose】 □ Remove steam and exhaust gases generated during etching □ Waterproof fan forcibly exhausts exhaust gases

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