Designed mainly for research on thermal processing of semiconductors.
It is a system that allows for space-saving and functional use by packaging various types of furnaces into a single device.
Inquire About This Product
basic information
【Features】 ○ 4-Stage Diffusion Furnace (ARF-112-4 Type) ○ Single-Stage Diffusion Furnace (ARF-153W Type) ○ Single-Stage Diffusion Furnace (ARF-150 Type) ● For more details, please contact us or refer to the catalog.
Price information
Please feel free to contact us.
Delivery Time
※Please feel free to contact us.
Applications/Examples of results
Research on thermal treatment of semiconductors (dry oxidation, wet oxidation, diffusion, reduction, general processing, etc.)
catalog（1）
Download All Catalogs
Company information
Our company is a manufacturer of tube furnaces and electric furnaces. Based in Chiba Prefecture, we have been involved in electric furnaces for 25 years. We also offer proposals, design, and manufacturing for diffusion furnaces, annealing furnaces, and replacement furnaces, so please feel free to consult with us. We promise to meet our customers' expectations with innovative ideas and extensive know-how, delivering guaranteed satisfaction.