Significantly improved throughput.
This is a vent filter manufactured by Pureron Japan, used in semiconductor manufacturing equipment. In load lock chambers and transfer chambers, the generation of particles and transient turbulence during vacuum break can lead to particle adhesion and damage to wafers. Traditionally, this phenomenon was prevented by slowly introducing nitrogen gas through a slow vent; however, using Pureron's vent filter significantly improves throughput.
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basic information
【Features】 ○ All materials are made of SUS316L. ○ Maximum operating temperature is 400℃. ○ Filtration precision is 0.003μm. ○ Due to its cup-shaped design, gas injection is possible from the tip. ○ Custom orders are available. ● For more details, please contact us.
Price information
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.
