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  4. Semiconductor Manufacturing Equipment
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  6. Hastelloy all-metal gas filter

Hastelloy all-metal gas filter

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UCH-M Series

last updated:Jun 20, 2012

ピー・ジェイ
ピー・ジェイ
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Using Hastelloy for all materials.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It efficiently removes particles larger than 0.003 μm even under high flow rates and high differential pressures. We offer a wide range of products from low flow rates of about 10 L/min to medium flow rates of about 250 L/min. Compared to conventional metal filters, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size.

    CVD EquipmentSemiconductor inspection/test equipmentGas Filters
UCH-Mシリーズ.jpg

Hastelloy all-metal gas filter

UCH-Mシリーズ.jpg
UCH-Mシリーズ.jpg

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basic information

【Features】 ○ The filtration precision is 0.003 μm. ○ The recommended flow rate is 15 to 250 L/min for various types. ○ The design pressure is 17 MPa (2,465 PSIG) at 20°C. ○ The maximum operating temperature is 460°C (inert gas). ● For more details, please contact us or refer to the catalog.

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Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.

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ピー・ジェイ

ピー・ジェイ

Electronic Components and Semiconductors

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PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.

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