Supports a wide range of filtration precision.
This is a gas filter manufactured by Purelon Japan Co., Ltd. It supports a wide range of filtration precision from 0.1 to 10 μm under steady flow and pulsation conditions. Corrosive materials are not used in the filter components, so there is no risk of corrosion or secondary byproducts. By using a dedicated baking heater in conjunction, we achieved a degassing (moisture content) of 1.2 ppb in APIMS measurements. With continued use, levels down to 0.1 ppb are possible.
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basic information
【Features】 ○ Filtration precision is available in various sizes: 0.1, 0.5, 1.0, 5.0, and 10 μm. ○ Recommended flow rates are 40 L/min and 60 L/min. ○ Design pressure is 17 MPa (2,465 PSIG) at 20°C. ○ Maximum operating temperature is 400°C. ● For more details, please contact us or refer to the catalog.
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Applications/Examples of results
Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.
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