It is a batch-type plasma cleaning device (plasma cleaner) suitable for surface modification.
This device allows you to select the processing mode from RIE mode and plasma mode, enabling optimal processing according to the type of substrate. Additionally, it is a very compact tabletop plasma cleaner designed to save space and can be used in various locations.
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basic information
【Features】 - Compact design allows for tabletop installation - Automatic operation and manual operation via touch panel are possible - Process parameters can be saved (100 recipes, each with 10 steps) ● For other functions and details, please contact us.
Price information
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Delivery Time
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Applications/Examples of results
【Applications】 ○ Surface cleaning of plastic packages such as BGA and CSP, and lead frames ○ Precision cleaning of optical components, molds, etc. ○ Surface modification of organic films ○ Photoresist stripping ○ Removal of organic contamination layers and general improvement of adhesion ● For other functions and details, please contact us.
Company information
We excel in the technology of thin film formation and processing at the nano to micro level, and we are well-regarded for providing equipment and technology for both research and development applications as well as production purposes. Additionally, we specialize in the optoelectronics field, particularly in light sources (LEDs and semiconductor lasers), which are expected to see market expansion in the future.
