This is a batch-type plasma cleaner that is ideal for surface cleaning of plastic packages, LCD substrates, hybrid ICs, and more.
The reaction chamber can be equipped with multiple tiers of electrode shelves, allowing for the processing of a large number of substrates in various shapes, from small components to square substrates for FPD. Additionally, it is a plasma cleaner that can select from three processing modes (RIE mode, plasma mode, downstream mode), enabling optimal processing according to the type of substrate.
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basic information
【Features】 ○ Three types of processing modes (RIE, plasma, and downstream modes) can be selected, allowing for optimal processing according to the type of substrate. ○ Multiple tiers of large electrode shelves can be equipped, enabling mass production processing. ○ Fully automated operation is possible. ○ Compact design. ● For other functions and details, please contact us.
Price information
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Delivery Time
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Applications/Examples of results
【Applications】 ○ Surface cleaning of plastic packages, LCD substrates, multi-chip modules, hybrid ICs, etc. ○ Precision cleaning of optical components ○ Surface treatment of fibers and polymer materials ○ Photoresist stripping ○ Ink removal ● For other functions and details, please contact us.
Company information
We excel in the technology of thin film formation and processing at the nano to micro level, and we are well-regarded for providing equipment and technology for both research and development applications as well as production purposes. Additionally, we specialize in the optoelectronics field, particularly in light sources (LEDs and semiconductor lasers), which are expected to see market expansion in the future.
