Real-time measurement and correction of the emissivity of the target wafer during the semiconductor process enables accurate temperature measurement regardless of the type of wafer film!
Monitoring the wafer temperature during the semiconductor process is a very important process parameter; however, due to the lack of an established appropriate measurement method, we have been inferring the process conditions based on parameters other than temperature. Despite the variation in emissivity within a lot, general radiation thermometers require the user to arbitrarily determine the emissivity of the object being measured, leading to temperature errors and a lack of reliability in the temperature measurement itself. Our real-time emissivity-corrected semiconductor process temperature monitor can measure and correct the emissivity of the target wafer in real time, enabling accurate temperature measurement regardless of the type of wafer film. Additionally, thanks to our unique high-sensitivity infrared measurement technology, measurements can be taken down to low temperatures (close to the sensitivity limit of the detector). We can also provide various solutions for the stray light issues that have been problematic in the chamber.
Inquire About This Product
basic information
The temperature monitor is a next-generation non-contact semiconductor process temperature monitor that can simultaneously solve the issues related to emissivity that have not been resolved until now, as well as the problems of temperature measurement during the silicon wafer process. It also monitors the emissivity of the wafer in real-time.
Price information
-
Delivery Time
Applications/Examples of results
Ideal for in-situ wafer temperature monitoring during semiconductor processes such as PVD, CVD, and RTP equipment.
Company information
If you have any inquiries regarding infrared technology, please feel free to consult us. We will introduce you to the world's cutting-edge technologies. We handle a wide range of infrared equipment, including blackbody furnaces, spectrometers, infrared cameras, CO2 monitors, and wafer temperature monitors, as well as infrared sensors, windows, lenses, and other infrared components. We also offer measurement services and equipment rentals. If you are unsure about selecting optical components such as infrared sensors, filters, or window materials, please do not hesitate to contact us.