It is a device for floating zone refining, single crystal growth, and dislocation-free single crystal growth of silicon rods.
The floating zone semiconductor refining device heats silicon rods with high frequency in an Ar gas atmosphere and performs floating zone refining, or single crystallization, or dislocation-free single crystallization. For more details, please download the catalog.
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basic information
【Specifications】 ○ A 30 kW 3 MHz electron tube type high-frequency induction heating power supply is used as the heating power source. ○ The system is composed of a high-frequency induction heating power supply, a floating zone refining furnace, an anti-vibration table, a comprehensive control panel, and an operation panel. ○ The safety circuit of the high-frequency induction heating power supply includes (1) overcurrent (primary side), (2) Ip overcurrent, (3) Ig overcurrent, (4) panel switch, and (5) cooling water interruption (water pressure/water flow). ○ The vacuum level of the floating zone refining furnace reaches the order of 10^-6 torr. ○ The Ar flow of the floating zone refining furnace is Ar gas flow rate: 1 to 5 (L/sec). ● For more details, please contact us or download the catalog.
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