We have various types of deposition sources available.
A lineup of small area evaporation sources, ion-assisted small area evaporation sources, large area evaporation sources, three-source evaporation sources, atomic hydrogen sources, power supplies for evaporation sources, large area evaporation power supplies, and crucibles for various evaporators. For more details, please contact us or refer to the catalog.
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basic information
【Product Lineup】 ○ Small Area Deposition Source EFM2 → Deposition Area: φ5 to φ20mm → Temperature Range: 160 to 3300℃ ○ Small Area Deposition Source EFM3 → Deposition Area: φ5 to φ20mm → Temperature Range: 160 to 3300℃ ○ Ion Assist Small Area Deposition Source EFM3i → Deposition Area: φ5 to φ20mm → Temperature Range: 160 to 3300℃ ○ Large Area Deposition Source EFM4 → Deposition Area: φ10 to φ50mm → Temperature Range: 160 to 3300℃ ○ Triple Source Deposition Source Triple-EFM → Deposition Area: φ8.5, 11, 15mm → Operating Distance: Approximately 93±10mm ○ Large Area Deposition Source EFM6 → Deposition Area: Over φ50mm → Crucible Capacity: Up to 10ccm ○ Atomic Hydrogen Source EFM-H → Acceleration Voltage: 0-1keV (100mA) → Beam Irradiation Angle: ±6 to ±15° (depends on power) ○ Power Supply for Deposition Source EVC100L/100 ○ Power Supply for Deposition Source EVC300/300i ○ Large Area Deposition Power Supply EVC1200 ○ Crucibles for Various Deposition Devices → Crucible Materials: Tungsten, Tantalum, and others ● For more details, please contact us or refer to the catalog.
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Company information
On May 28, 2015, VG Scienta and Omicron NanoTechnology merged to start anew as Scienta Omicron. Scienta Omicron Co., Ltd. was established as the general agent in Japan with the aim of making a substantial contribution to research and development in the country. VG Scienta has recognized the importance of photoelectron spectroscopy since its early days and has developed and introduced many related devices to the market as a top global brand. Omicron NanoTechnology has continuously provided cutting-edge technology to the market through its outstanding product lineup, including scanning tunneling microscopes (STM), atomic force microscopes (AFM), and X-ray photoelectron spectroscopy (XPS) systems, all utilizing ultra-high vacuum technology. Moving forward, our mission is not only to provide state-of-the-art evaluation technology-related equipment but also to contribute to the development of science and industry in Japan by offering comprehensive services and technical support. We hope you look forward to our evaluation technologies.