Repeat accuracy = 20nm!!!
UV type / thermal curing type This is a device compatible with 300mm wafers. It performs parallel alignment of molds, pressurization, UV irradiation, and demolding, achieving high-precision repeat positioning accuracy for step-and-repeat processes. It is ideal as an alternative patterning method for lithography (such as terabyte optical discs, LEDs, microlenses, diffusion films, high-density packages, etc.). It is suitable for both research and development and mass production. Ultra-high precision repeatability accuracy = 20nm
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basic information
<Composition> 1. XY axis air slide 2. Linear motor 3. Linear gauge 4. Z axis air slider 5. Parallel delivery mechanism 6. Micro dispenser 7. Auto focus port 8. Substrate holder 9. Mold holder 10. UV irradiation unit 11. Air conditioning system
Price information
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Delivery Time
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Applications/Examples of results
Terabyte optical discs, LEDs, micro lenses, diffusion films, high-density packages, etc.
Company information
We will challenge the unknown world based on optics. The 21st century is said to be the "age of light," with remarkable advancements in optical technology. In our manufacturing company, we aim to accelerate future-oriented technological capabilities centered around "optical technology," actively tackling the information technology, ultra-fine technology, and scientific technology that the times require, and to be a dynamic company that acts swiftly. At the same time, we are committed to continuously promoting innovations suitable for the new century, striving to create safe and reliable products, and to remain a company that is needed by the world, actively working towards a richer society. We sincerely ask for your continued guidance and support.
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