Large-area ion beam irradiation device

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last updated：Jan 21, 2014

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Modify the surface of a material through doping without forming a film! Contributes to improved wear resistance, enhanced fatigue resistance, and reduced friction.

ISYS Corporation's large-area ion beam irradiation device modifies the surface of materials through doping without film formation. The ion beam device alters the surface by injecting accelerated ions into the product surface. It enhances the surface properties of metals, ceramics, and polymers. The ion beam energy is up to 300 KeV, the ion beam current ranges from 5 to 50 mA, and the ion beam irradiation area is 400mm x 400mm. The processing effects include improvements in mechanical properties such as increased wear resistance, enhanced fatigue resistance, and reduced friction. Additionally, improvements in electrical/optical properties include increased electrical conductivity and UV blocking. Furthermore, enhancements in chemical properties include hydrophilicity/hydrophobicity, oxidation resistance, corrosion resistance, and amorphization. For more details, please contact us or refer to the catalog.

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**Features** ○ A method to modify surfaces by injecting accelerated ions into the product surface ○ Improvement of surface properties such as metals, ceramics, and polymers ○ Technology licensed from the Korea Atomic Energy Research Institute ○ Basic specifications → Ion beam energy: up to 300 KeV → Ion beam current: 5 to 50 mA → Ion beam irradiation area: 400mm × 400mm ○ Treatment effects → Improvement of mechanical properties: enhanced wear resistance, improved fatigue resistance, reduced friction → Enhancement of electrical/optical properties: electrical conductivity, UV blocking → Improvement of chemical properties: hydrophilicity/hydrophobicity, oxidation resistance, corrosion resistance, amorphization ○ Application fields → Semiconductor manufacturing (doping), static electricity prevention, electromagnetic wave shielding, durability, wear resistance, gemstone coloration, hydrophilic/hydrophobic treatment, etc. ○ Application devices → Large-area ion irradiation machine → Ion beam sputtering system → High-current ion implanter ○ Applications → Hair clippers, black diamonds, sun visors, IC trays ● For more details, please contact us or refer to the catalog.