While enabling wideband measurements, we have significantly reduced running costs. 【ULVAC】
ULVAC has developed and commercialized the transducer-type "G-TRAN Series Multi-Ion Gauge" (patent pending), which allows for the connection of measuring elements with different measurement ranges. In conventional multi-principle vacuum gauges, we often hear customer feedback such as "a failure of one measuring element requires the complete replacement of all measuring elements," "the measuring elements are complex and prone to failure," and "the measuring elements are expensive." With this new approach, we can enable wide-range measurements while significantly reducing running costs and addressing low environmental impact. 【Product Lineup】 ○SH2-1 Standard Specification ○SH2-2 Serial Communication Specification For more details, please contact us or download the catalog.
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basic information
**Features** ○ Wide range measurement → Capable of measuring from atmospheric pressure to high vacuum (10⁵ to 5×10⁻⁸ Pa) (when using SPU and SAU simultaneously) ○ Connectable measurement sensors with different measurement ranges → By adopting a multi-ion gauge (patent pending), it is possible to select sensors according to the application ○ Accurate atmospheric pressure measurement → Easy and accurate confirmation of atmospheric pressure (when using SAU) ○ Low environmental impact → Only the necessary sensors can be replaced, allowing for reduced running costs ○ Improved visibility → Equipped with an LED to confirm abnormalities ○ Maintenance-friendly → Easy replacement of sensors ○ Measurement value output signal → Pressure output of 0 to 10V (Log output) ○ Control output signal → Capable of outputting three set points (SH2-1) ○ Serial communication specifications → RS232C/RS485 communication is possible (SH2-2) ○ Compliance standards → Complies with CE standards ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ For process control in high vacuum areas of various manufacturing equipment, including solar cells, FPDs, semiconductors, and electronic components. ○ To confirm the achieved pressure in the high vacuum areas of various manufacturing equipment with multiple process chambers, such as inline and batch systems. ○ For pressure measurement in high vacuum and ultra-high vacuum equipment. ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.