TELEMARK Ion Source Series for Ion-Assisted Deposition
Mni-Gun(800W)、XIAD(1000W)、ST55(1500W)、ST3000(3000W)
We provide the ideal ion source for ion assist deposition.
We provide the ideal ion source for ion-assisted deposition made by TELEMARK. The ion-assisted deposition (IAD) technology is a process that enables high-density and stable film formation without excessive substrate heating. TELEMARK's gridless ion source system allows for stable ion-assisted deposition on various substrates such as glass, plastic, and metal, thanks to its uniquely designed ion source.
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basic information
The TELEMARK ion source series features: 1. Lightweight and compact design allows for great flexibility in installation on equipment. 2. Unique ion source design (patented) enables a very small size while still providing 3. A large ion current over a wide range. 4. High-efficiency water cooling structure keeps operating temperatures very low (70-80°C), minimizing thermal damage to substrates, and there are no parts that wear out due to heat, making it maintenance-free. 5. Ion beams can be obtained with a minimal amount of gas, allowing operation at low pressures. 6. The specially coated ion source can operate stably without charge-up due to oxidation even in high-concentration oxygen. 7. A stable beam can be achieved just 3 seconds after startup. 8. Operation mode switching is possible between pulse mode, continuous mode, substrate cleaning mode, and gas purge mode. 9. Equipped with RS232 for control from an external PC. 10. An ion current monitor is available as an option. 11. Feedback control of ion current is possible.
Price range
P5
Delivery Time
Applications/Examples of results
Deposition device, etc.
Detailed information
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Mini-Gun 800W, 4A, 90～225eV UHV specifications
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XIAD 1000W, 5A, 225eV
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ST55 1500W, 7A, 225eV
Line up（4）
| Model number | overview |
|---|---|
| Mini-Gun | 800W, 4A, 90～225eV, ※UHV specification |
| XIAD | 1000W, 5A, 225eV |
| ST55 | 1500W, 7A, 225eV |
| ST3000 | 3000W, 10A, 300eV |
Company information
VISTA Corporation is a specialized vacuum technology company that develops, manufactures, sells, and provides consulting and technical contracting for vacuum gauges, vacuum pumps, and other products suitable for ultra-high vacuum and extreme vacuum, backed by staff with many years of experience in vacuum technology and the vacuum market. If you are not satisfied with commercially available vacuum products, please feel free to consult with us.
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