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MEMS development process equipment

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last updated:Sep 24, 2012

ナノテック
ナノテック
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MEMS development tools and precision alignment nanotech

In the "MEMS Development Process Equipment," we offer a variety of devices including the compact standard model for fine exposure, the "Single-Sided Mask Aligner," the low-cost assist model for double-sided processes, the "Front Mask Aligner," the standard mass production machine for double-sided and multi-sided processes, the "Simultaneous Double-Sided Exposure Mask Aligner," the custom equipment for automation and mass production, the "Auto Mask Aligner," the dedicated exposure device, the "Custom Mask Aligner," the alignment fixing device compatible with custom designs, the "Precision Alignment Holder" using a unique clamping mechanism, the "UV Nano Imprinter / Micro Contact Printer" for precise transfer with low residual film and low bubbles, the industry-standard "General Purpose Spray Coater," and the unique low-cost mask production machine, the "Simple Mask Production Machine," among many others. For more details, please contact us or refer to the catalog.

    Other processing machines
02.MEMS.JPG

MEMS development process equipment

02.MEMS.JPG
02.MEMS.JPG
  • Related Link - http://www.nanotech-inc.co.jp/index.html

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【Featured Products】 [Mask Aligners] ○ Single-Sided Mask Aligner LA series → A compact standard machine for fine exposure ○ Front Mask Aligner BA series → A low-cost assist model for double-sided processes ○ Double-Sided Simultaneous Exposure Mask Aligner BS series → A standard mass production machine for double-sided and multi-sided processes [Automatic Alignment Exposure Equipment] ○ Auto Mask Aligner AE series → A custom device for automation and mass production [Dedicated Exposure Equipment] ○ Custom Mask Aligner ES series [Temporary Fixing Devices] ○ Alignment Fixing Device MA・AMA series → Custom design support ○ Precision alignment holder using a unique clamping mechanism [Precision Transfer Devices] ○ UV Nano Imprinter → Low residual film and low bubbles ○ Micro Contact Printer → Compatible with the mCP method, which is gaining attention as a next-generation device fabrication technique [Coaters] ○ Spray Coater DC series [Glass Mask Fabrication Machine] ○ Simple Mask Fabrication Machine MM605 ● For more details, please contact us or refer to the catalog.

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MEMS development process equipment

MEMS development process equipment

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ナノテック

ナノテック

Testing, Analysis and Measurement

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