MEMS development tools

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last updated：Sep 24, 2012

ナノテック

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This is product information for NanoTech's MEMS development tools.

The "MEMS Development Tools" includes a variety of equipment such as standard single-sided mask aligners, sample backside observation aligners referred to as "mask aligners," UV nanoimprinters and micro-contact printers called "imprints," spray coaters known as "coaters," and a unique low-cost mask fabrication machine called "simple mask fabrication machine." It also features numerous devices including alignment equipment for anodic bonding, infrared observation alignment equipment, various bonding alignment devices referred to as "temporary bonding devices," vacuum bonding equipment known as "anodic bonding devices," and the simple mask fabrication machine "MM605." For more details, please contact us or refer to the catalog.

Related Link - http://www.nanotech-inc.co.jp/index.html

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basic information

[Published Products] [Mask Aligners] ○ Standard Single-Sided Exposure Aligner → φ4, 6, 8 inches ○ BA Series Sample Backside Observation Aligner → φ4, 6 inches ○ BS Series Double-Sided Simultaneous Exposure Aligner → 4-Sided Simultaneous Exposure, 3-Lamp Simultaneous Aligner ○ ES20 Various Custom Aligners [Imprint] ○ lmpFlex UV Nano Imprinter ○ PA400s Micro Contact Printer [Coater] ○ DC Series Spray Coater [Temporary Fixing Device] ○ MA・AMA Series → Alignment Device for Anodic Bonding → Infrared Observation Alignment Device → Various Lamination Alignment Devices [Anodic Bonding Device] ○ APA01 Vacuum Bonding Device [Simple Mask Production Machine] ○ MM605 ● For more details, please contact us or refer to the catalog.