Spray cooler developed for MEMS devices and various semiconductor research!
The Spray Coater 3D Resist Coating Device DC110/DC210 is a spray coater developed for MEMS devices and various semiconductor research. With a spray nozzle capable of fine particle generation, it can form a uniform film even on inclined surfaces, trapezoidal shapes, and right-angle vertex areas that are difficult to coat with conventional spinners. It also enables resist embedding coating in cavity, via hole, and trench structures, which are challenging to achieve with spinners. The coating thickness can range from spinner-class thin films to ultra-thick films. It supports ultra-thick resists such as the AZ Electronic Materials AZ-P4000 series, MicroChem SU8, KMPR series, as well as benzocyclobutene resin (BCB) and various polymers. Additionally, it can apply high-viscosity liquids (depending on the liquid properties). By applying only to the necessary minimum area, there is no waste of liquid as seen in spin coating. The nozzle-moving multi-pass scanning method accommodates large samples. For more details, please contact us or refer to the catalog.
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【Features】 ○ High-precision uniform coating of film thickness is possible through quantitative coating parameter settings. ○ By using a dedicated special jig, it is possible to minimize edge bead and backside coverage. ○ Film thickness can range from 1μm to 600μm (depending on the chemical properties). ○ In-plane distribution is within ±5% (excluding edge bead areas; depends on film thickness and chemical properties). ○ A syringe is placed close to the spray area, minimizing waste in the chemical piping (only for DC110). ○ Equipped with a heater-integrated sample stage, allowing for sample temperature control up to 100°C. ○ The spray nozzle is movable on the XY axis, enabling miniaturization of the device. ○ The booth operates on a downflow system. ○ The touch panel color LCD display makes operation easy and understandable. ○ The nozzle movement path, number of overlapping coats, and chemical delivery volume can be specified through programming. ○ Includes a test run function for pre-checking the spray path. ○ Uses low-vibration, low-heat, high-precision "Si-Servo" servo motors. ○ Compatible with MEMS devices. ○ Uniform coating of film thickness on uneven surfaces. ○ Coating for via and trench filling. ○ Special specifications are also accepted. ● For more details, please contact us or refer to the catalog.
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For inquiries regarding MEMS micromachine-related development tools, please contact us.