Explaining wet etching technology based on extensive practical experience and cutting-edge research on mechanisms and influencing factors!
○Publication Date: July 30, 2008 ○Format: B5 size hardcover, 223 pages ○Price: List price 55,000 yen → STbook member price: 52,190 yen + tax ○Authors: Katsusai Matsumoto, Hachinohe Institute of Technology / Kenji Takai, Hitachi Chemical Co., Ltd. / Osamu Tada, Hirai Precision Industry Co., Ltd. / Norio Ishikawa, Kanto Chemical Co., Ltd. / Mitsuhiro Shikida, Nagoya University / Kazunori Shinoda, Hitachi, Ltd. / Manabu Tokeji, Nagoya University / Yoshikuni Kikutani, Micro Chemical Research Institute Co., Ltd. / Takashi Oguni, Toray Engineering Co., Ltd. / Koichi Ishihara, Toyo Cross Co., Ltd. / Kazuya Yamamura, Osaka University / Atsushi Takenaka, Asahi Glass Co., Ltd. / Tetsuo Aoyama, Hayashi Pure Chemical Industries, Ltd. / Yasumasa Inohara, Ishii Label Co., Ltd. / Kingo Itaya, Tohoku University / Hideki Yao, Sumitomo Electric Industries, Ltd. / Kazutoshi Kanji, Hitachi, Ltd.
Inquire About This Product
basic information
Chapter 1: Mechanisms of Wet Etching and Factors Affecting Etching Speed and Precision Section 1: Mechanisms of Copper Wet Etching and Dominant Influencing Factors Section 2: Characteristics of Copper Etching Solutions and Speed Controlling Factors Section 3: Optimization of Metal and Alloy Wet Etching Processes Section 4: Challenges and Countermeasures in Wet Etching of Transparent Conductive Films (ITO) Section 5: Mechanisms of Anisotropic Wet Etching and Optimization of Processing Section 6: Wet Etching Techniques for Compound Semiconductors Section 7: Wet Etching of Glass - Methods for Fabricating Microchemical Chips Section 8: Wet Etching of Polyimide Section 9: Wet Etching of PET Film Section 10: High-Precision Processing of Optical Elements Using Local Wet Etching Methods Section 11: Performance Evaluation of BM's Cr Etching Solutions Chapter 2: Management and Optimization of Etching Solutions and Baths Chapter 3: Types and Characteristics of Wet Etching Equipment and Key Points in Etching Processing Chapter 4: Prospects for Advanced Technology Development
Price information
Main unit 55,000 yen + tax → STbook member price: 52,190 yen + tax
Price range
P2
Delivery Time
P2
Applications/Examples of results
Advanced technology
catalog（4）
Download All Catalogs
Company information
S&T Publishing publishes technical books aimed at researchers and engineers.