Non-contact linear position sensor

Vacuum-compatible and high-precision for semiconductor manufacturing equipment.

Temposonics absolute linear displacement sensors combine high-speed response performance, accuracy, and durability even in harsh environments. Many manufacturers around the world need to operate machines efficiently to reduce power consumption, CO2 emissions, and costs, while shortening cycle times and achieving zero downtime. Therefore, they adopt the high-performance, maintenance-free linear displacement sensors proposed by Temposonics, which are resistant to vibration and shock, and are not affected by water, dust, or oil in terms of accuracy. [For transport devices in vacuum chambers for semiconductors, LCDs, organic ELs, etc.] The sensing rod section (up to 20m) is installed in the vacuum, and magnets are attached to the work side to measure accurate positions (with a resolution of 1μm) at multiple locations (up to 30 points) simultaneously. It is possible to achieve significant cost reductions not only in price but also in labor, as there is no need to use expensive components such as special cables and readers dedicated to vacuum, and no installation precision is required.

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