Vacuum-compatible and high-precision for semiconductor manufacturing equipment.
Temposonics absolute linear displacement sensors combine high-speed response performance, accuracy, and durability even in harsh environments. Many manufacturers around the world need to operate machines efficiently to reduce power consumption, CO2 emissions, and costs, while shortening cycle times and achieving zero downtime. Therefore, they adopt the high-performance, maintenance-free linear displacement sensors proposed by Temposonics, which are resistant to vibration and shock, and are not affected by water, dust, or oil in terms of accuracy. [For transport devices in vacuum chambers for semiconductors, LCDs, organic ELs, etc.] The sensing rod section (up to 20m) is installed in the vacuum, and magnets are attached to the work side to measure accurate positions (with a resolution of 1μm) at multiple locations (up to 30 points) simultaneously. It is possible to achieve significant cost reductions not only in price but also in labor, as there is no need to use expensive components such as special cables and readers dedicated to vacuum, and no installation precision is required.
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basic information
【Features】 1. High resolution of 1μm + high precision position detection 2. High-speed response performance achieving 10kHz 3. Noise reduction 4. Vibration resistance of 30G 5. Non-contact with no friction, resistant to water, oil, and dust 6. Absolute (absolute position measurement, no need for origin return)
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Applications/Examples of results
Transport devices in vacuum chambers for semiconductors, liquid crystals, organic EL, etc.
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Company information
Temposonics introduced a non-contact, high-precision, and cost-effective non-contact absolute sensor method to the market in the early 1970s, using the magnetostrictive effect (Weidmann effect) for position measurement, which had previously been dominated by incremental methods. As a leading company in magnetostrictive sensors, we are committed to improving accuracy as position sensors, engaging in research and development, and enhancing quality to meet the needs of the industrial sector. Our sensors are increasingly being adopted not only as linear sensors to replace rotary encoders, linear encoders, and potentiometers but also in various industries such as hydraulics, pneumatics, water pressure, injection molding, welding, printing, textiles, construction machinery, wind power generation, metal processing, as well as in disaster prevention sensors like landslide sensors and bridge sensors. Temposonics will continue to develop further and strive day and night to be of service as a leading company in industrial sensors.