Ultra-precision positioning piezo stage with PK aperture type, XY axis
Piezo Stage PK Type
This is an XY-axis stage type with an opening (transparent hole) in the center of the movable table. It is ideal for use in combination with microscopes and light-transmitting devices.
This is a type of XY-axis stage with a PK opening, designed for ultra-precision positioning piezo stages. You can choose from five different models with strokes ranging from 100/100μm to 300/300μm and resolutions from 2/2nm to 6/6nm. This lineup features an opening (transparent hole) in the center of the moving table. It is suitable for laser transmission, fine observation combined with microscopes and analytical instruments, and high-precision mapping measurements. ■ From compact to large openings We offer a compact opening type suitable for small devices, as well as a large opening type that can align large panel substrates. ■ Smooth and precise scanning High-precision feedback control allows for reliable operation according to command signals. We also accommodate requests for special environments (vacuum, non-magnetic, etc.), so please feel free to consult with us. *For more details, please download the materials or feel free to contact us.
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basic information
【Features】 ○ A type with an opening (transparent hole) in the center of the movable table ○ Ideal for fine observation and high-precision mapping measurements when combined with microscopes and analytical instruments ○ High-speed, high-precision scanning operation ○ User-friendly interface ○ Compatible with special environments (vacuum, non-magnetic, etc.) 【XY Axis Stage Product Lineup】 ○ PK2L130-100U ○ PK2L150-100U ○ PK2L150-200U ○ PK2L150-300U ○ PK2L280-200U *For more details, please download the materials or feel free to contact us.
Price information
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Delivery Time
P4
Applications/Examples of results
Scanning Probe Microscope Microscope Sample Stage Spectroscopic Analysis Equipment Semiconductor and FPD-related Equipment Exposure Equipment Mapping Measurement
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Company information
Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.