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  6. Ultra-precision positioning piezo stage PS basic type Z-axis

Ultra-precision positioning piezo stage PS basic type Z-axis

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last updated:May 24, 2023

THKプレシジョン
THKプレシジョン
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The high responsiveness of the piezoelectric element and the closed-loop control using the built-in displacement sensor enable high-speed, high-resolution, and highly reproducible positioning.

This is the Z-axis stage of the PS Basic Series, which features ultra-precision positioning piezo stages. The Z-axis stages are available in a wide range of products with strokes from 6μm to 300μm and body sizes from 35×35×26mm to 80×80×60mm. The PS Basic Series enables high-speed, high-precision positioning thanks to the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors, allowing for fast, high-resolution, and highly reproducible positioning. It boasts an easy-to-use interface, and the control controller can be selected with both analog and digital input interfaces, allowing for simple position commands from a computer. Sample software (free of charge) is also available. Additionally, we offer custom solutions from single units, and we can design and manufacture piezo stages tailored to various requirements, including vacuum or non-magnetic specifications, as well as integration into equipment, beyond the standard catalog products. *For more details, please download the materials or feel free to contact us.*

    Other machine elements
nanocontrol_pszjiku.jpg

Ultra-precision positioning piezo stage PS basic type Z-axis

nanocontrol_pszjiku.jpg
nanocontrol_pszjiku.jpg
  • Related Link - https://www.thkprecision.co.jp/product/piezo/41

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basic information

【Features】 ○ High-speed, high-precision positioning ○ User-friendly interface ○ Custom solutions available from single units 【Z-axis Stage Product Lineup】 ○ PSVH35-006U ○ PSVH45-012U ○ PSVH60F-012U ○ PSVH60-020U ○ PSVH80F-030U ○ PSVL45F-100U ○ PSVL60F-100U ○ PSVL60F-150U ○ PSVL80F-300U *For more details, please download the materials or feel free to contact us.

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Applications/Examples of results

【Application Examples】 ○ HDD Testing ○ Semiconductor and LCD Inspection Equipment ○ Interferometer Equipment ○ Optical Pickup Inspection and Evaluation ○ Confocal Microscope ○ Nanometer Positioning For more details, please contact us.

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Piezo Stage PS Basic Type Catalog

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THKプレシジョン

THKプレシジョン

Machine elements and parts

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Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.

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