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  6. Ultra-precision positioning piezo stage with PK opening type, XYZ axis

Ultra-precision positioning piezo stage with PK opening type, XYZ axis

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last updated:May 24, 2023

THKプレシジョン
THKプレシジョン
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This is a type of XYZ axis stage with an opening (transparent hole) in the center of the movable table. It is ideal for use in combination with microscopes and light-transmitting devices.

This is a PK opening type XYZ axis stage with ultra-precision positioning piezo stage. We offer products with strokes ranging from 100/100/30μm to 300/300/100μm. The PK opening type features an opening (transparent hole) in the center of the moving table. It is ideal for fine observation and high-precision mapping measurements when combined with microscopes and analytical instruments. With high-speed, high-precision scanning operations, the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors enable positioning with high speed, high resolution, and high reproducibility. In small ranges, it provides faster and more reliable operation compared to stepping motor stages. The user-friendly interface control controller allows for the selection of both analog and digital input interfaces, enabling easy position commands from a computer. It supports not only point-to-point movement but also continuous reciprocating motion like raster scanning and arc motion that describes a perfect circle. Additionally, we can accommodate requests for special environments (such as vacuum and non-magnetic), so please feel free to consult us. *For more details, please download the materials or feel free to contact us.

    Other machine elements
nanocontrol_pkxyzjiku.jpg

Ultra-precision positioning piezo stage with PK opening type, XYZ axis

nanocontrol_pkxyzjiku.jpg
nanocontrol_pkxyzjiku.jpg
  • Related Link - https://www.thkprecision.co.jp/product/piezo/42

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【Features】 ○ Type with an opening (transparent hole) in the center of the movable table ○ Ideal for fine observation and high-precision mapping measurements when combined with microscopes and analytical instruments ○ High-speed, high-precision scanning operation ○ User-friendly interface ○ Compatible with special environments (vacuum, non-magnetic, etc.) 【XYZ Axis Stage Product Lineup】 ○ PK3L150-100UA ○ PK3L150-100UA ○ PK3L150-200UA ○ PK3L150-300UA *For more details, please download the materials or feel free to contact us.

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Applications/Examples of results

Scanning Probe Microscope Microscope Sample Stage Spectroscopic Analysis Equipment Semiconductor and FPD Related Equipment Exposure Equipment Mapping Measurement

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THKプレシジョン

THKプレシジョン

Machine elements and parts

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Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.

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