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  6. Ultra-precision positioning piezo stage PS basic type XYZ axis

Ultra-precision positioning piezo stage PS basic type XYZ axis

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last updated:May 24, 2023

THKプレシジョン
THKプレシジョン
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Achieves high-speed, high-resolution positioning with excellent reproducibility. The strokes range from 20/20/12μm to 80/80/80μm.

This is the XYZ axis stage of the PS Basic Series, which features ultra-precision positioning piezo stages. The XYZ axis stages are available in a comprehensive lineup with strokes ranging from 20/20/12μm to 80/80/80μm. The PS Basic Series enables high-speed, high-precision positioning due to the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors, allowing for fast, high-resolution, and highly reproducible positioning. It boasts an easy-to-use interface, and the control controller can be selected with both analog and digital input interfaces, allowing for easy position commands from a computer. Sample software (free of charge) is also available. Additionally, we offer custom solutions from single units, and we can design and manufacture piezo stages tailored to various requirements, including vacuum or non-magnetic specifications, as well as integration into devices, beyond standard catalog products. *For more details, please download the materials or feel free to contact us.*

    Other machine elements
nanocontrol_psxyzjiku.jpg

Ultra-precision positioning piezo stage PS basic type XYZ axis

nanocontrol_psxyzjiku.jpg
nanocontrol_psxyzjiku.jpg
  • Related Link - https://www.thkprecision.co.jp/product/piezo/41

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basic information

【Features】 ○ High-speed, high-precision positioning ○ User-friendly interface ○ Custom solutions available from single units 【XYZ Axis Stage Product Lineup】 ○ PS3H70-020UA ○ PS3H150-050UA ○ PS3L100-080UA ○ PS3L60-080U ● For more details, please contact us or download the catalog.

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Applications/Examples of results

【Application Examples】 ○ HDD Testing ○ Semiconductor and LCD Inspection Equipment ○ Interferometer Equipment ○ Optical Pickup Inspection and Evaluation ○ Confocal Microscope ○ Nanometer Positioning For more details, please contact us.

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Piezo Stage PS Basic Type Catalog

Piezo Stage PS Basic Type Catalog

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THKプレシジョン

THKプレシジョン

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Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.

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