Mechanical properties of thin films and multilayer films and their measurement and evaluation methods.
S30221 "Thin Film Evaluation"
★Wear, adhesion, and hardness in thin films! ★How to evaluate mechanical properties such as wear resistance, adhesion, and hardness, which are important indicators of durability?
Tokyo Chuo Ward Industrial Hall 4F, Room 2 【Tokyo, Chuo Ward】 February 26, 2013 (Tuesday) 13:30-16:30 Instructor: Mr. Takahito Omura, Group Leader, Strength Design Group, Structural Materials Unit, Element Strategy Materials Center, National Institute for Materials Science (NIMS) http://ec.techzone.jp/products/detail.php?product_id=3053
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basic information
**Lecture Summary** The mechanical properties such as wear resistance, adhesion, and hardness of various functional thin films are important indicators of durability evaluation. This presentation will explain the classification of mechanical properties and provide a basic overview of each mechanism, along with clear explanations of the measurement and evaluation methods for each. Additionally, we will discuss the ultra-micro indentation test (nanoindentation method), which has gained attention as a cutting-edge technique for evaluating thin films with thicknesses on the nanometer scale, a demand that has increased in recent years. We will explain the measurement principles and characteristics such as measurement accuracy, and introduce examples of applications to various thin films. Furthermore, we will present a real-time deformation behavior analysis method using in-situ indentation within a transmission electron microscope, one of the latest analytical instruments, showcasing actual measurement examples through videos and other materials.
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After February 12, the regular price will be 49,350 yen (including tax and text costs) for up to 2 people from one company.
Price range
P2
Delivery Time
P2
Applications/Examples of results
**Program** 1. Introduction to the Evaluation Methods of Mechanical Properties of Thin Films 1.1. Internal Stress 1.1.1. Overview of Internal Stress 1.1.2. Measurement Methods for Internal Stress (X-ray Electron Diffraction, Raman Spectroscopy, Deflection Measurement, Optical Methods, Electrical Methods) 1.2. Adhesion 1.2.1. Overview of Adhesion 1.2.2. Testing Methods for Adhesion Strength (Peel Test, Tensile Test, Scratch Test) 1.3. Friction and Wear 1.3.1. Thin Films and Tribology 1.3.2. Evaluation Methods for Friction and Wear (FFM, AFM Scratch) 2. Evaluation of Mechanical Properties through Hardness Testing and Related Technologies 2.1. Hardness 2.1.1. What is Hardness 2.1.2. Hardness Testing Methods 2.2. Overview of Nanoindentation Method 2.2.1. Measurement Principles and History of Device Development 2.2.2. Analysis Methods for Load-Displacement Curves 2.2.3. Features of SPM Integrated Devices 2.2.4. Development Status of Related Technologies 3. Evaluation of Mechanical Properties using Nanoindentation Method 3.1. Evaluation of Thin Films using Nanoindentation 3.2. Introduction of Application Examples
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