Customizable in size, adsorption pattern, and temperature!
We uniformly heat extremely thin workpieces such as wafers and glass substrates. The maximum temperature that can be achieved is 300°C. The workpieces are fixed by vacuum suction, so no stress is applied to them during fixation. By combining with a manual simple XY stage, you can build an inspection station on a low budget. Precise temperature control is also possible with the MSA digital temperature controller. OEM support is also available. ● For more details, please download the catalog or contact us.
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basic information
【Specifications】 ○ Temperature control range: Room temperature to 300℃ ○ Chuck surface size: 6” size ○ Temperature accuracy: ±1.0% ● For more details, please download the catalog or contact us.
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For more details, please contact us.
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Wafer Hot Chuck
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We invite production engineers and manufacturing staff to visit the MSA Factory website, which provides strong support!