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  6. Wafer Hot Chuck (Heating/Cooling) "PJ-101 Type"

Wafer Hot Chuck (Heating/Cooling) "PJ-101 Type"

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last updated:Jun 19, 2013

MSAファクトリー
MSAファクトリー
  • Official site

Supports a wide range from low to high temperatures! Ideal for temperature testing of electronic devices and wafers.

The "PJ-101 model" is a wafer hot chuck (heating and cooling) that can be added to existing evaluation and testing equipment, making it ideal for small quantities and research and development. It uses a heater as the heating source and a Peltier (air-cooled) as the cooling source, supporting high-speed temperature profile processes. It operates on an AC100V power supply, allowing for both cooling and heating. The temperature controller is a dedicated type that can handle both cooling and heating with a single unit. The chucking (suction) pattern can also be customized to match the workpiece. ● For more details, please download the catalog or contact us.

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Wafer Hot Chuck (Heating/Cooling) "PJ-101 Type"

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  • Related Link - http://msa-factory.co.jp/category/hot-1/

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basic information

【Specifications】 ○ Temperature control range: -30 to +200℃ ○ Work size: 100×100mm ○ Plate material: Aluminum (anodized, gold-plated) ○ Digital temperature controller: PCC-100PE ● For more details, please download the catalog or contact us.

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Wafer Hot Chuck (Heating/Cooling)

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Wafer Hot Chuck (Heating/Cooling) "PJ-101 Type"

Wafer Hot Chuck (Heating/Cooling) "PJ-101 Type"

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MSAファクトリー

MSAファクトリー

Industrial Electrical Equipment

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