Energy-saving with pumps, installing high vacuum equipment in a quiet and comfortable environment.
This product reduces power consumption, vibration, heat generation, and acoustic noise by controlling the rotary pump. In many high vacuum systems, rotary pumps are operated continuously as roughing pumps for high vacuum pumps. However, once the system reaches high vacuum, the outgassing becomes minimal. In this system, a buffer chamber is placed between the rotary pump and the high vacuum pump, and by monitoring the vacuum level, the rotary pump is operated and stopped intermittently while maintaining high vacuum within the system.
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basic information
<Components> 1. Rotary pump control device 2. Vacuum buffer chamber 3. Case 4. Pirani gauge 5. Electromagnetic bellows valve 6. Connection kit <Options> 1. Buffer chamber shape and capacity 2. Foreline trap
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Applications/Examples of results
- Reduction of running costs for surface analysis equipment such as XPS and SIMS - Reduction of vibrations in microscopes such as SEM, TEM, FIB, and STM
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Company information
In companies, the wave of rationalization and labor-saving is advancing with technological revolution, requiring more miniaturization, higher sophistication, and greater diversification. In such an environment, our company is always striving to stay half a step ahead of the changing times, bringing together youth, hard work, and capability. We are passionate about contributing to the development of society as Electronics Marketing Corporation, based on our original ideas, meticulous services, and Excellent Confidence.