Short delivery time available! Inline gas filter for high purity gas!
Developed for semiconductor manufacturing process gases. Achieves excellent removal efficiency and low pressure loss through complex flow paths! It has high particle removal efficiency and filtration accuracy, excelling in gas replacement characteristics, pressure resistance, and corrosion resistance. There are two types of filter elements: - Metal sintered type made of SUS316L - PTFE membrane type You can select according to the type of gas. The manufacturer's catalog includes a list of compatibility according to gas types, so please use it for equipment selection. 【Features】 - 100% He leak tested (1.0×10^-9 atm·cc/sec) - 100% particle tested (no detection of particles larger than 0.0025μm) - Manufactured, tested, and packaged in a Class 100 cleanroom - Available in a wide flow range (15–9,000 SPLM) - Metal face seal (MFS) fittings and double ferrule tube fittings Customers currently using products from other companies, if you provide your application or other product numbers, we will propose equivalent products! Please feel free to contact us. *The section "Reason for Interest" displayed during PDF download is generated by Ipros Inc.'s AI.
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basic information
【Specifications】 Particle Capture Rate: 99.9999999% Filtration Precision: 0.0025μm Housing: SUS316L (Single Melt Material / Double Melt Material) Element: Metal Sintered Type, PTFE Membrane Type Internal Surface Finish: ≦ Ra 5μ inch (0.127μm) Porosity: 60-70% (Percentage of gaps per unit area) Connection Type: Metal Face Seal (MFS Joint: Equivalent to VCR), Double Ferrule Joint Flow Rate Range: 15-9,000 SLPM Maximum Operating Pressure: ~21MPa (at 20℃): Element Metal Sintered Type ~0.98MPa (at 20℃): Element PTFE Membrane Type ● For more details, please download the catalog or contact us.
Price information
【Element: SUS316L Metal Sintering】 Rated Flow: 60SLPM, 1/4" VCR Type SS-A60-4VM 16,310 yen Rated Flow: 600SLPM, 1/2" VCR Type SS-H600-8VM 42,660 yen 【Element: PTFE Membrane】 Rated Flow: 50SLPM, 1/4" VCR Type ST-A50-4VM 22,580 yen Rated Flow: 1500SLPM, 3/4" VCR Type ST-C1500-12VM 174,540 yen There are also various lineups for other sizes and connections.
Delivery Time
※The delivery time may vary depending on the quantity, so please feel free to contact us.
Applications/Examples of results
【Application】For process gases used in semiconductor manufacturing 【Track Record】Gas control systems for semiconductor manufacturing equipment, gas supply equipment, gas boxes, etc.
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Company information
We, Value Impact Co., Ltd., were established with the business purpose of providing products and services that have an impact on value, thereby enhancing our customers' competitiveness, promoting business growth, and expanding market share. One of these products and services includes fluid control equipment and piping components sourced from overseas manufacturers. Each company excels in cost performance while achieving the high-level quality demanded by our customers. As a sales company in Japan, we promise to propose products that fit our customers' needs and provide comprehensive customer support. Furthermore, we will continue to discover, evaluate, and supply valuable products from around the world, striving to achieve our business objectives. In 2017, we established the Yokohama Technical Center in Yokohama City. At this center, we conduct experiments (such as operation and functionality checks) and assembly work for our imported products. Aiming for further service improvement, we also handle the design and production of gas piping, valve boxes, cylinder cabinets, and more at this center. *The section titled "What sparked your interest" displayed during the PDF download is generated by Ipros Co., Ltd.'s AI.