We provide contract analysis services equipped with devices for physical analysis, and we also offer on-site analysis.
The main equipment includes "HR-TEM," "Q-pole type SIMS," "μESCA," and "RAMAN." We have accumulated know-how in micro and nano-level surface analysis, allowing us to provide highly reliable data in a short period. We also offer advice on the analysis of unknown samples. 【Surface Analysis - Secondary Ion Mass Spectrometry (SIMS)】 ○ This method involves mass analysis of secondary ions emitted from the sample when irradiated with Cs or O2 ions at several keV, enabling compositional analysis of all elements containing hydrogen. ○ It allows for high-sensitivity elemental analysis and excellent depth resolution measurements using low-energy ions. ● For more details, please download the catalog or contact us.
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basic information
【Features】 ○ A method for compositional analysis of all elements containing hydrogen through mass spectrometry of secondary ions emitted by irradiating the sample with Cs or O2 ions in the range of a few keV. ○ Enables high-sensitivity elemental analysis and excellent depth resolution measurements using low-energy ions. ● For more details, please download the catalog or contact us.
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For more details, please contact us.
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Applications/Examples of results
- Dopant profile evaluation - Thin film composition distribution evaluation - Elemental surface and cross-sectional distribution evaluation
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The Ion Tech Center is a professional group that provides consulting and technical development support in "ion implantation," "physical analysis," and research and development. We aim to be a good partner for companies and university researchers as a creative laboratory equipped with cutting-edge technology and facilities that meet the demands of the times.


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