It is an analytical method made possible by excellent measurements!
"Secondary Ion Mass Spectrometry" is a method for compositional analysis of all elements containing hydrogen by mass analysis of secondary ions emitted when Cs or O2 ions in the range of several keV are irradiated onto a sample. It enables highly sensitive elemental analysis and excellent depth resolution measurements using low-energy ions. [Features] - Compositional analysis of all elements containing hydrogen - Elemental analysis is possible - Measurement of depth resolution using low-energy ions is possible *For more details, please refer to the catalog or feel free to contact us.
Inquire About This Product
basic information
【Application】 ■ Dopant profile evaluation ■ Thin film composition distribution evaluation ■ Surface and cross-sectional elemental distribution evaluation *For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the catalog or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
The Ion Tech Center is a professional group that provides consulting and technical development support in "ion implantation," "physical analysis," and research and development. We aim to be a good partner for companies and university researchers as a creative laboratory equipped with cutting-edge technology and facilities that meet the demands of the times.
![[Analysis Case] High-Sensitivity Analysis of Light Elements in Semiconductor Substrates Using SIMS](https://image.mono.ipros.com/public/product/image/bff/2000026119/IPROS1320775171095140593.jpg?w=280&h=280)
![[Analysis Case] Evaluation of Si-based IGBT Chip Cross-section by Low-Temperature Micro Photoluminescence Analysis](https://image.mono.ipros.com/public/product/image/3c5/2000329659/IPROS1371167197596247742.jpg?w=280&h=280)
