Optimal for wafer transport in an acidic or alkaline atmosphere during the LSI manufacturing process.
The waterproof 3-axis cylindrical coordinate robot SWHR3156 series is compatible with 300mm wafers and features a flip + edge grip function. With an IP64 protection rating, it is suitable for wafer transport in acidic and alkaline environments during the LSI manufacturing process. It transports wafers at high speed and high precision through S-curve acceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
Inquire About This Product
basic information
【Features】 ○ Arm variation: 156mm ○ Z-axis variation: 200mm, 300mm ○ Load capacity: 3kgf or less equivalent to the third joint of the arm ○ The arm section is coated with Teflon for corrosion resistance ○ The arm joint section uses V-seals for waterproof structure ○ Joints of parts are sealed with BUNA-N gaskets ○ The Z-axis section uses bellows for waterproof structure ○ Equipped with operation monitor ○ Control method: RS232C and parallel photo I/O ○ All axes use 2-phase stepper motors ○ High-speed and high-precision transport of wafers through S-curve acceleration and deceleration control ○ Wafer holding: vacuum suction, drop-in, edge grip chuck ○ Compatible with optimal chucks tailored to the transported objects and equipment layout ● For more details, please contact us or refer to the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or refer to the catalog.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."